3/23/2010	12:02:11 AM	Run aborted at 12:02 AM
3/23/2010	12:02:11 AM	Helium valve closed
3/23/2010	12:02:11 AM	H2 valve closed
3/23/2010	12:02:11 AM	BCl3 valve closed
3/23/2010	12:02:11 AM	PH3 valve closed
3/23/2010	12:02:11 AM	SiCl4 pre valve closed
3/23/2010	12:02:11 AM	SiCl4 post valve closed
3/23/2010	12:02:11 AM	Bypass valve closed
3/23/2010	12:02:11 AM	Main Vac valve closed
3/23/2010	12:02:11 AM	Bubbler valve closed
3/23/2010	12:02:11 AM	Helium MFC set to  0.000000
3/23/2010	12:02:11 AM	H2 MFC set to  0.000000
3/23/2010	12:02:11 AM	BCl3 MFC set to  0.000000
3/23/2010	12:02:11 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:02:11 AM	Tube furnace set to 0
3/23/2010	12:05:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	12:05:29 AM	Recipe started at 12:05 AM
3/23/2010	12:05:29 AM	Helium valve closed
3/23/2010	12:05:29 AM	H2 valve closed
3/23/2010	12:05:29 AM	BCl3 valve closed
3/23/2010	12:05:29 AM	PH3 valve closed
3/23/2010	12:05:29 AM	SiCl4 pre valve closed
3/23/2010	12:05:29 AM	SiCl4 post valve closed
3/23/2010	12:05:29 AM	Main Vac valve closed
3/23/2010	12:05:29 AM	Bubbler valve closed
3/23/2010	12:05:29 AM	Bypass valve opened
3/23/2010	12:05:29 AM	Helium MFC set to  0.000000
3/23/2010	12:05:29 AM	H2 MFC set to  0.000000
3/23/2010	12:05:29 AM	BCl3 MFC set to  0.000000
3/23/2010	12:05:29 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:05:29 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:05:29 AM	Tube furnace set to 0
3/23/2010	12:06:43 AM	Helium valve closed
3/23/2010	12:06:43 AM	H2 valve closed
3/23/2010	12:06:43 AM	BCl3 valve closed
3/23/2010	12:06:43 AM	PH3 valve closed
3/23/2010	12:06:43 AM	SiCl4 pre valve closed
3/23/2010	12:06:43 AM	SiCl4 post valve closed
3/23/2010	12:06:43 AM	Bubbler valve closed
3/23/2010	12:06:43 AM	Main Vac valve opened
3/23/2010	12:06:43 AM	Bypass valve opened
3/23/2010	12:06:43 AM	Helium MFC set to  0.000000
3/23/2010	12:06:43 AM	H2 MFC set to  0.000000
3/23/2010	12:06:43 AM	BCl3 MFC set to  0.000000
3/23/2010	12:06:43 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:06:43 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:06:43 AM	Tube furnace set to 0
3/23/2010	12:06:43 AM	Run finished at 12:06 AM
3/23/2010	12:06:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	12:07:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	12:07:53 AM	Recipe started at 12:07 AM
3/23/2010	12:07:53 AM	H2 valve closed
3/23/2010	12:07:53 AM	BCl3 valve closed
3/23/2010	12:07:53 AM	PH3 valve closed
3/23/2010	12:07:53 AM	SiCl4 pre valve closed
3/23/2010	12:07:53 AM	SiCl4 post valve closed
3/23/2010	12:07:53 AM	Main Vac valve closed
3/23/2010	12:07:53 AM	Bypass valve closed
3/23/2010	12:07:53 AM	Bubbler valve closed
3/23/2010	12:07:53 AM	Helium valve opened
3/23/2010	12:07:53 AM	Helium MFC set to  500.000000
3/23/2010	12:07:53 AM	H2 MFC set to  0.000000
3/23/2010	12:07:53 AM	BCl3 MFC set to  0.000000
3/23/2010	12:07:53 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:07:53 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:07:53 AM	Tube furnace set to 0
3/23/2010	12:09:11 AM	Helium valve closed
3/23/2010	12:09:11 AM	H2 valve closed
3/23/2010	12:09:11 AM	BCl3 valve closed
3/23/2010	12:09:11 AM	PH3 valve closed
3/23/2010	12:09:11 AM	SiCl4 pre valve closed
3/23/2010	12:09:11 AM	SiCl4 post valve closed
3/23/2010	12:09:11 AM	Main Vac valve closed
3/23/2010	12:09:11 AM	Bypass valve closed
3/23/2010	12:09:11 AM	Bubbler valve closed
3/23/2010	12:09:11 AM	Helium MFC set to  0.000000
3/23/2010	12:09:11 AM	H2 MFC set to  0.000000
3/23/2010	12:09:11 AM	BCl3 MFC set to  0.000000
3/23/2010	12:09:11 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:09:11 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:09:11 AM	Tube furnace set to 0
3/23/2010	12:09:11 AM	Run finished at 12:09 AM
3/23/2010	12:09:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	12:09:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	12:09:50 AM	Recipe started at 12:09 AM
3/23/2010	12:09:50 AM	Helium valve closed
3/23/2010	12:09:50 AM	H2 valve closed
3/23/2010	12:09:50 AM	BCl3 valve closed
3/23/2010	12:09:50 AM	PH3 valve closed
3/23/2010	12:09:50 AM	SiCl4 pre valve closed
3/23/2010	12:09:50 AM	SiCl4 post valve closed
3/23/2010	12:09:50 AM	Main Vac valve closed
3/23/2010	12:09:50 AM	Bubbler valve closed
3/23/2010	12:09:50 AM	Bypass valve opened
3/23/2010	12:09:50 AM	Helium MFC set to  0.000000
3/23/2010	12:09:50 AM	H2 MFC set to  0.000000
3/23/2010	12:09:50 AM	BCl3 MFC set to  0.000000
3/23/2010	12:09:50 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:09:50 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:09:50 AM	Tube furnace set to 0
3/23/2010	12:10:14 AM	Helium valve closed
3/23/2010	12:10:14 AM	H2 valve closed
3/23/2010	12:10:14 AM	BCl3 valve closed
3/23/2010	12:10:14 AM	PH3 valve closed
3/23/2010	12:10:14 AM	SiCl4 pre valve closed
3/23/2010	12:10:14 AM	SiCl4 post valve closed
3/23/2010	12:10:14 AM	Bubbler valve closed
3/23/2010	12:10:14 AM	Main Vac valve opened
3/23/2010	12:10:14 AM	Bypass valve opened
3/23/2010	12:10:14 AM	Helium MFC set to  0.000000
3/23/2010	12:10:14 AM	H2 MFC set to  0.000000
3/23/2010	12:10:14 AM	BCl3 MFC set to  0.000000
3/23/2010	12:10:14 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:10:14 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:10:14 AM	Tube furnace set to 0
3/23/2010	12:10:14 AM	Run finished at 12:10 AM
3/23/2010	12:10:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	12:12:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/23/2010	12:12:16 AM	Recipe started at 12:12 AM
3/23/2010	12:12:16 AM	H2 valve closed
3/23/2010	12:12:16 AM	BCl3 valve closed
3/23/2010	12:12:16 AM	PH3 valve closed
3/23/2010	12:12:16 AM	SiCl4 pre valve closed
3/23/2010	12:12:16 AM	SiCl4 post valve closed
3/23/2010	12:12:16 AM	Main Vac valve closed
3/23/2010	12:12:16 AM	Bypass valve closed
3/23/2010	12:12:16 AM	Bubbler valve closed
3/23/2010	12:12:16 AM	Helium valve opened
3/23/2010	12:12:16 AM	Helium MFC set to  500.000000
3/23/2010	12:12:16 AM	H2 MFC set to  0.000000
3/23/2010	12:12:16 AM	BCl3 MFC set to  0.000000
3/23/2010	12:12:16 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:12:16 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:12:16 AM	Tube furnace set to 0
3/23/2010	12:13:37 AM	Helium valve closed
3/23/2010	12:13:37 AM	H2 valve closed
3/23/2010	12:13:37 AM	BCl3 valve closed
3/23/2010	12:13:37 AM	PH3 valve closed
3/23/2010	12:13:37 AM	SiCl4 pre valve closed
3/23/2010	12:13:37 AM	SiCl4 post valve closed
3/23/2010	12:13:37 AM	Main Vac valve closed
3/23/2010	12:13:37 AM	Bypass valve closed
3/23/2010	12:13:37 AM	Bubbler valve closed
3/23/2010	12:13:37 AM	Helium MFC set to  0.000000
3/23/2010	12:13:37 AM	H2 MFC set to  0.000000
3/23/2010	12:13:37 AM	BCl3 MFC set to  0.000000
3/23/2010	12:13:37 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:13:37 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:13:37 AM	Tube furnace set to 0
3/23/2010	12:13:52 AM	Helium valve closed
3/23/2010	12:13:52 AM	H2 valve closed
3/23/2010	12:13:52 AM	BCl3 valve closed
3/23/2010	12:13:52 AM	PH3 valve closed
3/23/2010	12:13:52 AM	SiCl4 pre valve closed
3/23/2010	12:13:52 AM	SiCl4 post valve closed
3/23/2010	12:13:52 AM	Main Vac valve closed
3/23/2010	12:13:52 AM	Bubbler valve closed
3/23/2010	12:13:52 AM	Bypass valve opened
3/23/2010	12:13:52 AM	Helium MFC set to  0.000000
3/23/2010	12:13:52 AM	H2 MFC set to  0.000000
3/23/2010	12:13:52 AM	BCl3 MFC set to  0.000000
3/23/2010	12:13:52 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:13:52 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:13:52 AM	Tube furnace set to 0
3/23/2010	12:14:52 AM	Helium valve closed
3/23/2010	12:14:53 AM	H2 valve closed
3/23/2010	12:14:53 AM	BCl3 valve closed
3/23/2010	12:14:53 AM	PH3 valve closed
3/23/2010	12:14:53 AM	SiCl4 pre valve closed
3/23/2010	12:14:53 AM	SiCl4 post valve closed
3/23/2010	12:14:53 AM	Bubbler valve closed
3/23/2010	12:14:53 AM	Main Vac valve opened
3/23/2010	12:14:53 AM	Bypass valve opened
3/23/2010	12:14:53 AM	Helium MFC set to  0.000000
3/23/2010	12:14:53 AM	H2 MFC set to  0.000000
3/23/2010	12:14:53 AM	BCl3 MFC set to  0.000000
3/23/2010	12:14:53 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:14:53 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:14:53 AM	Tube furnace set to 0
3/23/2010	12:19:53 AM	H2 valve closed
3/23/2010	12:19:53 AM	BCl3 valve closed
3/23/2010	12:19:53 AM	PH3 valve closed
3/23/2010	12:19:53 AM	SiCl4 pre valve closed
3/23/2010	12:19:53 AM	SiCl4 post valve closed
3/23/2010	12:19:53 AM	Main Vac valve closed
3/23/2010	12:19:53 AM	Bypass valve closed
3/23/2010	12:19:53 AM	Bubbler valve closed
3/23/2010	12:19:53 AM	Helium valve opened
3/23/2010	12:19:53 AM	Helium MFC set to  500.000000
3/23/2010	12:19:53 AM	H2 MFC set to  0.000000
3/23/2010	12:19:53 AM	BCl3 MFC set to  0.000000
3/23/2010	12:19:53 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:19:53 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:19:53 AM	Tube furnace set to 0
3/23/2010	12:21:13 AM	Helium valve closed
3/23/2010	12:21:13 AM	H2 valve closed
3/23/2010	12:21:13 AM	BCl3 valve closed
3/23/2010	12:21:13 AM	PH3 valve closed
3/23/2010	12:21:13 AM	SiCl4 pre valve closed
3/23/2010	12:21:13 AM	SiCl4 post valve closed
3/23/2010	12:21:13 AM	Main Vac valve closed
3/23/2010	12:21:13 AM	Bypass valve closed
3/23/2010	12:21:13 AM	Bubbler valve closed
3/23/2010	12:21:13 AM	Helium MFC set to  0.000000
3/23/2010	12:21:13 AM	H2 MFC set to  0.000000
3/23/2010	12:21:13 AM	BCl3 MFC set to  0.000000
3/23/2010	12:21:13 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:21:13 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:21:13 AM	Tube furnace set to 0
3/23/2010	12:21:15 AM	Run aborted at 12:21 AM
3/23/2010	12:21:15 AM	Helium valve closed
3/23/2010	12:21:15 AM	H2 valve closed
3/23/2010	12:21:15 AM	BCl3 valve closed
3/23/2010	12:21:15 AM	PH3 valve closed
3/23/2010	12:21:15 AM	SiCl4 pre valve closed
3/23/2010	12:21:15 AM	SiCl4 post valve closed
3/23/2010	12:21:15 AM	Bypass valve closed
3/23/2010	12:21:15 AM	Main Vac valve closed
3/23/2010	12:21:15 AM	Bubbler valve closed
3/23/2010	12:21:15 AM	Helium MFC set to  0.000000
3/23/2010	12:21:15 AM	H2 MFC set to  0.000000
3/23/2010	12:21:15 AM	BCl3 MFC set to  0.000000
3/23/2010	12:21:15 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:21:15 AM	Tube furnace set to 0
3/23/2010	12:21:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/23/2010	12:21:23 AM	Helium MFC set to  100.000000
3/23/2010	12:21:26 AM	Helium valve opened
3/23/2010	12:21:33 AM	Bubbler valve opened
3/23/2010	12:22:10 AM	Bubbler valve closed
3/23/2010	12:22:18 AM	Bubbler valve opened
3/23/2010	12:22:23 AM	Bubbler valve closed
3/23/2010	12:22:29 AM	Bubbler valve opened
3/23/2010	12:22:47 AM	Bubbler valve closed
3/23/2010	12:22:48 AM	Helium valve closed
3/23/2010	12:22:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	12:22:53 AM	Recipe started at 12:22 AM
3/23/2010	12:22:53 AM	Helium valve closed
3/23/2010	12:22:53 AM	H2 valve closed
3/23/2010	12:22:53 AM	BCl3 valve closed
3/23/2010	12:22:53 AM	PH3 valve closed
3/23/2010	12:22:53 AM	SiCl4 pre valve closed
3/23/2010	12:22:53 AM	SiCl4 post valve closed
3/23/2010	12:22:53 AM	Main Vac valve closed
3/23/2010	12:22:53 AM	Bubbler valve closed
3/23/2010	12:22:53 AM	Bypass valve opened
3/23/2010	12:22:53 AM	Helium MFC set to  0.000000
3/23/2010	12:22:53 AM	H2 MFC set to  0.000000
3/23/2010	12:22:53 AM	BCl3 MFC set to  0.000000
3/23/2010	12:22:53 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:22:53 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:22:53 AM	Tube furnace set to 0
3/23/2010	12:23:29 AM	Helium valve closed
3/23/2010	12:23:29 AM	H2 valve closed
3/23/2010	12:23:29 AM	BCl3 valve closed
3/23/2010	12:23:29 AM	PH3 valve closed
3/23/2010	12:23:29 AM	SiCl4 pre valve closed
3/23/2010	12:23:29 AM	SiCl4 post valve closed
3/23/2010	12:23:29 AM	Bubbler valve closed
3/23/2010	12:23:29 AM	Main Vac valve opened
3/23/2010	12:23:29 AM	Bypass valve opened
3/23/2010	12:23:29 AM	Helium MFC set to  0.000000
3/23/2010	12:23:29 AM	H2 MFC set to  0.000000
3/23/2010	12:23:29 AM	BCl3 MFC set to  0.000000
3/23/2010	12:23:29 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:23:29 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:23:29 AM	Tube furnace set to 0
3/23/2010	12:23:30 AM	Run finished at 12:23 AM
3/23/2010	12:23:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	12:24:14 AM	Bypass valve closed
3/23/2010	12:24:15 AM	Main Vac valve closed
3/23/2010	12:24:22 AM	Main Vac valve opened
3/23/2010	12:24:23 AM	Bypass valve opened
3/23/2010	12:25:57 AM	Recipe started at 12:25 AM
3/23/2010	12:25:57 AM	Helium valve closed
3/23/2010	12:25:57 AM	BCl3 valve closed
3/23/2010	12:25:57 AM	PH3 valve closed
3/23/2010	12:25:57 AM	SiCl4 pre valve closed
3/23/2010	12:25:57 AM	SiCl4 post valve closed
3/23/2010	12:25:57 AM	Main Vac valve closed
3/23/2010	12:25:57 AM	Bypass valve closed
3/23/2010	12:25:57 AM	Bubbler valve closed
3/23/2010	12:25:57 AM	H2 valve opened
3/23/2010	12:25:57 AM	Helium MFC set to  0.000000
3/23/2010	12:25:57 AM	H2 MFC set to  500.000000
3/23/2010	12:25:57 AM	BCl3 MFC set to  0.000000
3/23/2010	12:25:57 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:25:57 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:25:57 AM	Tube furnace set to 0
3/23/2010	12:27:19 AM	Helium valve closed
3/23/2010	12:27:19 AM	BCl3 valve closed
3/23/2010	12:27:19 AM	PH3 valve closed
3/23/2010	12:27:19 AM	SiCl4 pre valve closed
3/23/2010	12:27:19 AM	SiCl4 post valve closed
3/23/2010	12:27:19 AM	Main Vac valve closed
3/23/2010	12:27:19 AM	Bypass valve closed
3/23/2010	12:27:19 AM	H2 valve opened
3/23/2010	12:27:19 AM	Bubbler valve opened
3/23/2010	12:27:19 AM	Helium MFC set to  0.000000
3/23/2010	12:27:19 AM	H2 MFC set to  500.000000
3/23/2010	12:27:19 AM	BCl3 MFC set to  0.000000
3/23/2010	12:27:19 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:27:19 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:27:19 AM	Tube furnace set to 0
3/23/2010	12:27:32 AM	Helium valve closed
3/23/2010	12:27:32 AM	H2 valve closed
3/23/2010	12:27:32 AM	BCl3 valve closed
3/23/2010	12:27:32 AM	PH3 valve closed
3/23/2010	12:27:32 AM	SiCl4 pre valve closed
3/23/2010	12:27:32 AM	SiCl4 post valve closed
3/23/2010	12:27:32 AM	Main Vac valve closed
3/23/2010	12:27:32 AM	Bubbler valve closed
3/23/2010	12:27:32 AM	Bypass valve opened
3/23/2010	12:27:32 AM	Helium MFC set to  0.000000
3/23/2010	12:27:32 AM	H2 MFC set to  0.000000
3/23/2010	12:27:32 AM	BCl3 MFC set to  0.000000
3/23/2010	12:27:32 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:27:32 AM	Bypass solenoid MFC set to  760.000000
3/23/2010	12:27:32 AM	Tube furnace set to 0
3/23/2010	12:27:32 AM	Baratron reads 901.588320 Torr.  Emergency exit.
3/23/2010	12:27:37 AM	Run aborted at 12:27 AM
3/23/2010	12:27:38 AM	Helium valve closed
3/23/2010	12:27:38 AM	H2 valve closed
3/23/2010	12:27:38 AM	BCl3 valve closed
3/23/2010	12:27:38 AM	PH3 valve closed
3/23/2010	12:27:38 AM	SiCl4 pre valve closed
3/23/2010	12:27:38 AM	SiCl4 post valve closed
3/23/2010	12:27:38 AM	Main Vac valve closed
3/23/2010	12:27:38 AM	Bubbler valve closed
3/23/2010	12:27:38 AM	Bypass valve opened
3/23/2010	12:27:38 AM	Helium MFC set to  0.000000
3/23/2010	12:27:38 AM	H2 MFC set to  0.000000
3/23/2010	12:27:38 AM	BCl3 MFC set to  0.000000
3/23/2010	12:27:38 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:27:38 AM	Bypass solenoid MFC set to  760.000000
3/23/2010	12:27:38 AM	Tube furnace set to 0
3/23/2010	12:27:38 AM	Baratron reads 902.609148 Torr.  Emergency exit.
3/23/2010	12:27:39 AM	Program exited cleanly
3/23/2010	12:27:40 AM	Program started normally
3/23/2010	12:27:40 AM	Helium valve closed
3/23/2010	12:27:40 AM	H2 valve closed
3/23/2010	12:27:40 AM	BCl3 valve closed
3/23/2010	12:27:40 AM	PH3 valve closed
3/23/2010	12:27:40 AM	SiCl4 pre valve closed
3/23/2010	12:27:40 AM	SiCl4 post valve closed
3/23/2010	12:27:40 AM	Main Vac valve closed
3/23/2010	12:27:40 AM	Bypass valve closed
3/23/2010	12:27:40 AM	Bubbler valve closed
3/23/2010	12:27:40 AM	Helium MFC set to  0.000000
3/23/2010	12:27:40 AM	H2 MFC set to  0.000000
3/23/2010	12:27:40 AM	BCl3 MFC set to  0.000000
3/23/2010	12:27:40 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:27:40 AM	Bypass solenoid MFC set to  760.000000
3/23/2010	12:27:40 AM	Tube furnace set to 0
3/23/2010	12:27:40 AM	Helium valve closed
3/23/2010	12:27:40 AM	H2 valve closed
3/23/2010	12:27:40 AM	BCl3 valve closed
3/23/2010	12:27:40 AM	PH3 valve closed
3/23/2010	12:27:40 AM	SiCl4 pre valve closed
3/23/2010	12:27:40 AM	SiCl4 post valve closed
3/23/2010	12:27:40 AM	Main Vac valve closed
3/23/2010	12:27:40 AM	Bubbler valve closed
3/23/2010	12:27:40 AM	Bypass valve opened
3/23/2010	12:27:40 AM	Helium MFC set to  0.000000
3/23/2010	12:27:40 AM	H2 MFC set to  0.000000
3/23/2010	12:27:40 AM	BCl3 MFC set to  0.000000
3/23/2010	12:27:40 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:27:40 AM	Bypass solenoid MFC set to  760.000000
3/23/2010	12:27:40 AM	Tube furnace set to 0
3/23/2010	12:27:40 AM	Baratron reads 902.609148 Torr.  Emergency exit.
3/23/2010	12:27:41 AM	Program exited cleanly
3/23/2010	12:27:55 AM	Program started normally
3/23/2010	12:27:55 AM	Helium valve closed
3/23/2010	12:27:55 AM	H2 valve closed
3/23/2010	12:27:55 AM	BCl3 valve closed
3/23/2010	12:27:55 AM	PH3 valve closed
3/23/2010	12:27:55 AM	SiCl4 pre valve closed
3/23/2010	12:27:55 AM	SiCl4 post valve closed
3/23/2010	12:27:55 AM	Main Vac valve closed
3/23/2010	12:27:55 AM	Bypass valve closed
3/23/2010	12:27:55 AM	Bubbler valve closed
3/23/2010	12:27:55 AM	Helium MFC set to  0.000000
3/23/2010	12:27:55 AM	H2 MFC set to  0.000000
3/23/2010	12:27:55 AM	BCl3 MFC set to  0.000000
3/23/2010	12:27:55 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:27:55 AM	Bypass solenoid MFC set to  760.000000
3/23/2010	12:27:55 AM	Tube furnace set to 0
3/23/2010	12:27:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/23/2010	12:27:58 AM	Recipe started at 12:27 AM
3/23/2010	12:27:58 AM	Helium valve closed
3/23/2010	12:27:58 AM	H2 valve closed
3/23/2010	12:27:58 AM	BCl3 valve closed
3/23/2010	12:27:58 AM	PH3 valve closed
3/23/2010	12:27:58 AM	SiCl4 pre valve closed
3/23/2010	12:27:58 AM	SiCl4 post valve closed
3/23/2010	12:27:58 AM	Main Vac valve closed
3/23/2010	12:27:58 AM	Bypass valve closed
3/23/2010	12:27:58 AM	Bubbler valve closed
3/23/2010	12:27:58 AM	Helium MFC set to  0.000000
3/23/2010	12:27:58 AM	H2 MFC set to  0.000000
3/23/2010	12:27:58 AM	BCl3 MFC set to  0.000000
3/23/2010	12:27:58 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:27:58 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:27:58 AM	Tube furnace set to 0
3/23/2010	12:27:58 AM	Run finished at 12:27 AM
3/23/2010	12:27:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/23/2010	12:28:08 AM	Bubbler valve opened
3/23/2010	12:28:14 AM	Bubbler valve closed
3/23/2010	12:28:25 AM	Recipe started at 12:28 AM
3/23/2010	12:28:25 AM	Helium valve closed
3/23/2010	12:28:25 AM	BCl3 valve closed
3/23/2010	12:28:25 AM	PH3 valve closed
3/23/2010	12:28:25 AM	SiCl4 pre valve closed
3/23/2010	12:28:25 AM	SiCl4 post valve closed
3/23/2010	12:28:25 AM	Main Vac valve closed
3/23/2010	12:28:25 AM	Bypass valve closed
3/23/2010	12:28:25 AM	Bubbler valve closed
3/23/2010	12:28:25 AM	H2 valve opened
3/23/2010	12:28:25 AM	Helium MFC set to  0.000000
3/23/2010	12:28:25 AM	H2 MFC set to  500.000000
3/23/2010	12:28:25 AM	BCl3 MFC set to  0.000000
3/23/2010	12:28:25 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:28:25 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:28:25 AM	Tube furnace set to 0
3/23/2010	12:28:26 AM	Helium valve closed
3/23/2010	12:28:26 AM	BCl3 valve closed
3/23/2010	12:28:26 AM	PH3 valve closed
3/23/2010	12:28:26 AM	SiCl4 pre valve closed
3/23/2010	12:28:26 AM	SiCl4 post valve closed
3/23/2010	12:28:26 AM	Main Vac valve closed
3/23/2010	12:28:26 AM	Bypass valve closed
3/23/2010	12:28:26 AM	H2 valve opened
3/23/2010	12:28:26 AM	Bubbler valve opened
3/23/2010	12:28:26 AM	Helium MFC set to  0.000000
3/23/2010	12:28:26 AM	H2 MFC set to  500.000000
3/23/2010	12:28:26 AM	BCl3 MFC set to  0.000000
3/23/2010	12:28:26 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:28:26 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:28:26 AM	Tube furnace set to 0
3/23/2010	12:28:35 AM	Helium valve closed
3/23/2010	12:28:35 AM	H2 valve closed
3/23/2010	12:28:35 AM	BCl3 valve closed
3/23/2010	12:28:35 AM	PH3 valve closed
3/23/2010	12:28:35 AM	SiCl4 pre valve closed
3/23/2010	12:28:35 AM	SiCl4 post valve closed
3/23/2010	12:28:35 AM	Main Vac valve closed
3/23/2010	12:28:35 AM	Bubbler valve closed
3/23/2010	12:28:35 AM	Bypass valve opened
3/23/2010	12:28:35 AM	Helium MFC set to  0.000000
3/23/2010	12:28:35 AM	H2 MFC set to  0.000000
3/23/2010	12:28:35 AM	BCl3 MFC set to  0.000000
3/23/2010	12:28:35 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:28:35 AM	Bypass solenoid MFC set to  760.000000
3/23/2010	12:28:35 AM	Tube furnace set to 0
3/23/2010	12:28:35 AM	Baratron reads 910.775773 Torr.  Emergency exit.
3/23/2010	12:28:45 AM	Run aborted at 12:28 AM
3/23/2010	12:28:45 AM	Helium valve closed
3/23/2010	12:28:45 AM	H2 valve closed
3/23/2010	12:28:45 AM	BCl3 valve closed
3/23/2010	12:28:45 AM	PH3 valve closed
3/23/2010	12:28:45 AM	SiCl4 pre valve closed
3/23/2010	12:28:45 AM	SiCl4 post valve closed
3/23/2010	12:28:45 AM	Main Vac valve closed
3/23/2010	12:28:45 AM	Bubbler valve closed
3/23/2010	12:28:45 AM	Bypass valve opened
3/23/2010	12:28:45 AM	Helium MFC set to  0.000000
3/23/2010	12:28:45 AM	H2 MFC set to  0.000000
3/23/2010	12:28:45 AM	BCl3 MFC set to  0.000000
3/23/2010	12:28:45 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:28:45 AM	Bypass solenoid MFC set to  760.000000
3/23/2010	12:28:45 AM	Tube furnace set to 0
3/23/2010	12:28:45 AM	Baratron reads 911.796601 Torr.  Emergency exit.
3/23/2010	12:29:00 AM	Program exited cleanly
3/23/2010	12:29:02 AM	Program started normally
3/23/2010	12:29:02 AM	Helium valve closed
3/23/2010	12:29:02 AM	H2 valve closed
3/23/2010	12:29:02 AM	BCl3 valve closed
3/23/2010	12:29:02 AM	PH3 valve closed
3/23/2010	12:29:02 AM	SiCl4 pre valve closed
3/23/2010	12:29:02 AM	SiCl4 post valve closed
3/23/2010	12:29:02 AM	Main Vac valve closed
3/23/2010	12:29:02 AM	Bypass valve closed
3/23/2010	12:29:02 AM	Bubbler valve closed
3/23/2010	12:29:02 AM	Helium MFC set to  0.000000
3/23/2010	12:29:02 AM	H2 MFC set to  0.000000
3/23/2010	12:29:02 AM	BCl3 MFC set to  0.000000
3/23/2010	12:29:02 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:29:02 AM	Bypass solenoid MFC set to  760.000000
3/23/2010	12:29:02 AM	Tube furnace set to 0
3/23/2010	12:29:05 AM	Bypass valve opened
3/23/2010	12:29:08 AM	Main Vac valve opened
3/23/2010	12:29:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	12:29:43 AM	Recipe started at 12:29 AM
3/23/2010	12:29:43 AM	H2 valve closed
3/23/2010	12:29:43 AM	BCl3 valve closed
3/23/2010	12:29:43 AM	PH3 valve closed
3/23/2010	12:29:43 AM	SiCl4 pre valve closed
3/23/2010	12:29:43 AM	SiCl4 post valve closed
3/23/2010	12:29:43 AM	Main Vac valve closed
3/23/2010	12:29:43 AM	Bypass valve closed
3/23/2010	12:29:43 AM	Bubbler valve closed
3/23/2010	12:29:43 AM	Helium valve opened
3/23/2010	12:29:43 AM	Helium MFC set to  500.000000
3/23/2010	12:29:43 AM	H2 MFC set to  0.000000
3/23/2010	12:29:43 AM	BCl3 MFC set to  0.000000
3/23/2010	12:29:43 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:29:43 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:29:43 AM	Tube furnace set to 0
3/23/2010	12:31:01 AM	Helium valve closed
3/23/2010	12:31:01 AM	H2 valve closed
3/23/2010	12:31:01 AM	BCl3 valve closed
3/23/2010	12:31:01 AM	PH3 valve closed
3/23/2010	12:31:01 AM	SiCl4 pre valve closed
3/23/2010	12:31:01 AM	SiCl4 post valve closed
3/23/2010	12:31:01 AM	Main Vac valve closed
3/23/2010	12:31:01 AM	Bypass valve closed
3/23/2010	12:31:01 AM	Bubbler valve closed
3/23/2010	12:31:01 AM	Helium MFC set to  0.000000
3/23/2010	12:31:01 AM	H2 MFC set to  0.000000
3/23/2010	12:31:01 AM	BCl3 MFC set to  0.000000
3/23/2010	12:31:01 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:31:01 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:31:01 AM	Tube furnace set to 0
3/23/2010	12:31:01 AM	Run finished at 12:31 AM
3/23/2010	12:31:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	12:31:13 AM	Helium MFC set to  100.000000
3/23/2010	12:31:15 AM	Helium valve opened
3/23/2010	12:31:34 AM	Bubbler valve opened
3/23/2010	12:32:48 AM	Bubbler valve closed
3/23/2010	12:32:57 AM	Bubbler valve opened
3/23/2010	12:32:59 AM	Bubbler valve closed
3/23/2010	12:33:17 AM	Bubbler valve opened
3/23/2010	12:33:23 AM	Helium valve closed
3/23/2010	12:33:27 AM	Bubbler valve closed
3/23/2010	12:34:12 AM	Program exited cleanly
3/23/2010	12:40:49 AM	Program started normally
3/23/2010	12:40:49 AM	Helium valve closed
3/23/2010	12:40:49 AM	H2 valve closed
3/23/2010	12:40:49 AM	BCl3 valve closed
3/23/2010	12:40:49 AM	PH3 valve closed
3/23/2010	12:40:49 AM	SiCl4 pre valve closed
3/23/2010	12:40:49 AM	SiCl4 post valve closed
3/23/2010	12:40:49 AM	Main Vac valve closed
3/23/2010	12:40:49 AM	Bypass valve closed
3/23/2010	12:40:49 AM	Bubbler valve closed
3/23/2010	12:40:49 AM	Helium MFC set to  0.000000
3/23/2010	12:40:49 AM	H2 MFC set to  0.000000
3/23/2010	12:40:49 AM	BCl3 MFC set to  0.000000
3/23/2010	12:40:49 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:40:49 AM	Bypass solenoid MFC set to  760.000000
3/23/2010	12:40:49 AM	Tube furnace set to 0
3/23/2010	12:40:53 AM	Helium MFC set to  500.000000
3/23/2010	12:40:54 AM	Helium valve opened
3/23/2010	12:40:57 AM	Bubbler valve opened
3/23/2010	12:41:00 AM	Bubbler valve closed
3/23/2010	12:41:01 AM	Bubbler valve opened
3/23/2010	12:41:05 AM	Bubbler valve closed
3/23/2010	12:41:08 AM	Bubbler valve opened
3/23/2010	12:41:12 AM	Bubbler valve closed
3/23/2010	12:41:14 AM	Helium valve closed
3/23/2010	12:41:20 AM	Helium MFC set to  0.000000
3/23/2010	12:42:13 AM	Helium MFC set to  500.000000
3/23/2010	12:42:14 AM	Helium valve opened
3/23/2010	12:42:18 AM	Bubbler valve opened
3/23/2010	12:42:23 AM	Bubbler valve closed
3/23/2010	12:42:29 AM	Bubbler valve opened
3/23/2010	12:42:32 AM	Helium valve closed
3/23/2010	12:42:34 AM	Bubbler valve closed
3/23/2010	12:42:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	12:42:40 AM	Recipe started at 12:42 AM
3/23/2010	12:42:40 AM	Helium valve closed
3/23/2010	12:42:40 AM	H2 valve closed
3/23/2010	12:42:40 AM	BCl3 valve closed
3/23/2010	12:42:40 AM	PH3 valve closed
3/23/2010	12:42:40 AM	SiCl4 pre valve closed
3/23/2010	12:42:40 AM	SiCl4 post valve closed
3/23/2010	12:42:40 AM	Main Vac valve closed
3/23/2010	12:42:40 AM	Bubbler valve closed
3/23/2010	12:42:40 AM	Bypass valve opened
3/23/2010	12:42:40 AM	Helium MFC set to  0.000000
3/23/2010	12:42:40 AM	H2 MFC set to  0.000000
3/23/2010	12:42:40 AM	BCl3 MFC set to  0.000000
3/23/2010	12:42:40 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:42:40 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:42:40 AM	Tube furnace set to 0
3/23/2010	12:43:02 AM	Helium valve closed
3/23/2010	12:43:02 AM	H2 valve closed
3/23/2010	12:43:02 AM	BCl3 valve closed
3/23/2010	12:43:02 AM	PH3 valve closed
3/23/2010	12:43:02 AM	SiCl4 pre valve closed
3/23/2010	12:43:02 AM	SiCl4 post valve closed
3/23/2010	12:43:02 AM	Bubbler valve closed
3/23/2010	12:43:02 AM	Main Vac valve opened
3/23/2010	12:43:02 AM	Bypass valve opened
3/23/2010	12:43:02 AM	Helium MFC set to  0.000000
3/23/2010	12:43:02 AM	H2 MFC set to  0.000000
3/23/2010	12:43:02 AM	BCl3 MFC set to  0.000000
3/23/2010	12:43:02 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:43:02 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:43:02 AM	Tube furnace set to 0
3/23/2010	12:43:02 AM	Run finished at 12:43 AM
3/23/2010	12:43:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	12:44:06 AM	Recipe started at 12:44 AM
3/23/2010	12:44:06 AM	Helium valve closed
3/23/2010	12:44:06 AM	BCl3 valve closed
3/23/2010	12:44:06 AM	PH3 valve closed
3/23/2010	12:44:06 AM	SiCl4 pre valve closed
3/23/2010	12:44:06 AM	SiCl4 post valve closed
3/23/2010	12:44:06 AM	Main Vac valve closed
3/23/2010	12:44:06 AM	Bypass valve closed
3/23/2010	12:44:06 AM	Bubbler valve closed
3/23/2010	12:44:06 AM	H2 valve opened
3/23/2010	12:44:06 AM	Helium MFC set to  0.000000
3/23/2010	12:44:06 AM	H2 MFC set to  500.000000
3/23/2010	12:44:06 AM	BCl3 MFC set to  0.000000
3/23/2010	12:44:06 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:44:06 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:44:06 AM	Tube furnace set to 0
3/23/2010	12:45:25 AM	Helium valve closed
3/23/2010	12:45:25 AM	BCl3 valve closed
3/23/2010	12:45:25 AM	PH3 valve closed
3/23/2010	12:45:25 AM	SiCl4 pre valve closed
3/23/2010	12:45:25 AM	SiCl4 post valve closed
3/23/2010	12:45:25 AM	Main Vac valve closed
3/23/2010	12:45:25 AM	Bypass valve closed
3/23/2010	12:45:25 AM	H2 valve opened
3/23/2010	12:45:25 AM	Bubbler valve opened
3/23/2010	12:45:25 AM	Helium MFC set to  0.000000
3/23/2010	12:45:25 AM	H2 MFC set to  500.000000
3/23/2010	12:45:25 AM	BCl3 MFC set to  0.000000
3/23/2010	12:45:25 AM	SiCl4 MFC set to  0.000000
3/23/2010	12:45:25 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:45:25 AM	Tube furnace set to 0
3/23/2010	1:05:26 AM	Helium valve closed
3/23/2010	1:05:26 AM	BCl3 valve closed
3/23/2010	1:05:26 AM	PH3 valve closed
3/23/2010	1:05:26 AM	Main Vac valve closed
3/23/2010	1:05:26 AM	Bypass valve closed
3/23/2010	1:05:26 AM	H2 valve opened
3/23/2010	1:05:26 AM	SiCl4 pre valve opened
3/23/2010	1:05:26 AM	SiCl4 post valve opened
3/23/2010	1:05:26 AM	Bubbler valve opened
3/23/2010	1:05:26 AM	Helium MFC set to  0.000000
3/23/2010	1:05:26 AM	H2 MFC set to  500.000000
3/23/2010	1:05:26 AM	BCl3 MFC set to  0.000000
3/23/2010	1:05:26 AM	SiCl4 MFC set to  325.000000
3/23/2010	1:05:26 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	1:05:26 AM	Tube furnace set to 0
3/23/2010	1:25:26 AM	Helium valve closed
3/23/2010	1:25:26 AM	BCl3 valve closed
3/23/2010	1:25:26 AM	PH3 valve closed
3/23/2010	1:25:26 AM	SiCl4 pre valve closed
3/23/2010	1:25:26 AM	SiCl4 post valve closed
3/23/2010	1:25:26 AM	Main Vac valve closed
3/23/2010	1:25:26 AM	Bypass valve closed
3/23/2010	1:25:26 AM	H2 valve opened
3/23/2010	1:25:26 AM	Bubbler valve opened
3/23/2010	1:25:26 AM	Helium MFC set to  0.000000
3/23/2010	1:25:26 AM	H2 MFC set to  500.000000
3/23/2010	1:25:26 AM	BCl3 MFC set to  0.000000
3/23/2010	1:25:26 AM	SiCl4 MFC set to  0.000000
3/23/2010	1:25:26 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	1:25:26 AM	Tube furnace set to 0
3/23/2010	1:33:17 AM	H2 valve closed
3/23/2010	1:33:17 AM	BCl3 valve closed
3/23/2010	1:33:17 AM	PH3 valve closed
3/23/2010	1:33:17 AM	SiCl4 pre valve closed
3/23/2010	1:33:17 AM	SiCl4 post valve closed
3/23/2010	1:33:17 AM	Main Vac valve closed
3/23/2010	1:33:17 AM	Bypass valve closed
3/23/2010	1:33:17 AM	Helium valve opened
3/23/2010	1:33:17 AM	Bubbler valve opened
3/23/2010	1:33:17 AM	Helium MFC set to  500.000000
3/23/2010	1:33:17 AM	H2 MFC set to  0.000000
3/23/2010	1:33:17 AM	BCl3 MFC set to  0.000000
3/23/2010	1:33:17 AM	SiCl4 MFC set to  0.000000
3/23/2010	1:33:17 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	1:33:17 AM	Tube furnace set to 0
3/23/2010	1:33:41 AM	Run aborted at 1:33 AM
3/23/2010	1:33:41 AM	Helium valve closed
3/23/2010	1:33:41 AM	H2 valve closed
3/23/2010	1:33:41 AM	BCl3 valve closed
3/23/2010	1:33:41 AM	PH3 valve closed
3/23/2010	1:33:41 AM	SiCl4 pre valve closed
3/23/2010	1:33:41 AM	SiCl4 post valve closed
3/23/2010	1:33:41 AM	Bypass valve closed
3/23/2010	1:33:41 AM	Main Vac valve closed
3/23/2010	1:33:41 AM	Bubbler valve closed
3/23/2010	1:33:41 AM	Helium MFC set to  0.000000
3/23/2010	1:33:41 AM	H2 MFC set to  0.000000
3/23/2010	1:33:41 AM	BCl3 MFC set to  0.000000
3/23/2010	1:33:41 AM	SiCl4 MFC set to  0.000000
3/23/2010	1:33:41 AM	Tube furnace set to 0
3/23/2010	1:35:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	1:35:39 AM	Recipe started at 1:35 AM
3/23/2010	1:35:39 AM	H2 valve closed
3/23/2010	1:35:39 AM	BCl3 valve closed
3/23/2010	1:35:39 AM	PH3 valve closed
3/23/2010	1:35:39 AM	SiCl4 pre valve closed
3/23/2010	1:35:39 AM	SiCl4 post valve closed
3/23/2010	1:35:39 AM	Main Vac valve closed
3/23/2010	1:35:39 AM	Bypass valve closed
3/23/2010	1:35:39 AM	Bubbler valve closed
3/23/2010	1:35:39 AM	Helium valve opened
3/23/2010	1:35:39 AM	Helium MFC set to  500.000000
3/23/2010	1:35:39 AM	H2 MFC set to  0.000000
3/23/2010	1:35:39 AM	BCl3 MFC set to  0.000000
3/23/2010	1:35:39 AM	SiCl4 MFC set to  0.000000
3/23/2010	1:35:39 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	1:35:39 AM	Tube furnace set to 0
3/23/2010	1:35:41 AM	Helium valve closed
3/23/2010	1:35:41 AM	H2 valve closed
3/23/2010	1:35:41 AM	BCl3 valve closed
3/23/2010	1:35:41 AM	PH3 valve closed
3/23/2010	1:35:41 AM	SiCl4 pre valve closed
3/23/2010	1:35:41 AM	SiCl4 post valve closed
3/23/2010	1:35:41 AM	Main Vac valve closed
3/23/2010	1:35:41 AM	Bypass valve closed
3/23/2010	1:35:41 AM	Bubbler valve closed
3/23/2010	1:35:41 AM	Helium MFC set to  0.000000
3/23/2010	1:35:41 AM	H2 MFC set to  0.000000
3/23/2010	1:35:41 AM	BCl3 MFC set to  0.000000
3/23/2010	1:35:41 AM	SiCl4 MFC set to  0.000000
3/23/2010	1:35:41 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	1:35:41 AM	Tube furnace set to 0
3/23/2010	1:35:41 AM	Run finished at 1:35 AM
3/23/2010	1:35:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	1:49:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	1:49:02 AM	Recipe started at 1:49 AM
3/23/2010	1:49:02 AM	Helium valve closed
3/23/2010	1:49:02 AM	H2 valve closed
3/23/2010	1:49:02 AM	BCl3 valve closed
3/23/2010	1:49:02 AM	PH3 valve closed
3/23/2010	1:49:02 AM	SiCl4 pre valve closed
3/23/2010	1:49:02 AM	SiCl4 post valve closed
3/23/2010	1:49:02 AM	Main Vac valve closed
3/23/2010	1:49:02 AM	Bubbler valve closed
3/23/2010	1:49:02 AM	Bypass valve opened
3/23/2010	1:49:02 AM	Helium MFC set to  0.000000
3/23/2010	1:49:02 AM	H2 MFC set to  0.000000
3/23/2010	1:49:02 AM	BCl3 MFC set to  0.000000
3/23/2010	1:49:02 AM	SiCl4 MFC set to  0.000000
3/23/2010	1:49:02 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	1:49:02 AM	Tube furnace set to 0
3/23/2010	1:49:32 AM	Helium valve closed
3/23/2010	1:49:32 AM	H2 valve closed
3/23/2010	1:49:32 AM	BCl3 valve closed
3/23/2010	1:49:32 AM	PH3 valve closed
3/23/2010	1:49:32 AM	SiCl4 pre valve closed
3/23/2010	1:49:32 AM	SiCl4 post valve closed
3/23/2010	1:49:32 AM	Bubbler valve closed
3/23/2010	1:49:32 AM	Main Vac valve opened
3/23/2010	1:49:32 AM	Bypass valve opened
3/23/2010	1:49:32 AM	Helium MFC set to  0.000000
3/23/2010	1:49:32 AM	H2 MFC set to  0.000000
3/23/2010	1:49:32 AM	BCl3 MFC set to  0.000000
3/23/2010	1:49:32 AM	SiCl4 MFC set to  0.000000
3/23/2010	1:49:32 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	1:49:32 AM	Tube furnace set to 0
3/23/2010	1:49:33 AM	Run finished at 1:49 AM
3/23/2010	1:49:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	1:53:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/23/2010	1:53:20 AM	Recipe started at 1:53 AM
3/23/2010	1:53:21 AM	H2 valve closed
3/23/2010	1:53:21 AM	BCl3 valve closed
3/23/2010	1:53:21 AM	PH3 valve closed
3/23/2010	1:53:21 AM	SiCl4 pre valve closed
3/23/2010	1:53:21 AM	SiCl4 post valve closed
3/23/2010	1:53:21 AM	Main Vac valve closed
3/23/2010	1:53:21 AM	Bypass valve closed
3/23/2010	1:53:21 AM	Bubbler valve closed
3/23/2010	1:53:21 AM	Helium valve opened
3/23/2010	1:53:21 AM	Helium MFC set to  500.000000
3/23/2010	1:53:21 AM	H2 MFC set to  0.000000
3/23/2010	1:53:21 AM	BCl3 MFC set to  0.000000
3/23/2010	1:53:21 AM	SiCl4 MFC set to  0.000000
3/23/2010	1:53:21 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	1:53:21 AM	Tube furnace set to 0
3/23/2010	1:54:41 AM	Helium valve closed
3/23/2010	1:54:41 AM	H2 valve closed
3/23/2010	1:54:41 AM	BCl3 valve closed
3/23/2010	1:54:41 AM	PH3 valve closed
3/23/2010	1:54:41 AM	SiCl4 pre valve closed
3/23/2010	1:54:41 AM	SiCl4 post valve closed
3/23/2010	1:54:41 AM	Main Vac valve closed
3/23/2010	1:54:41 AM	Bypass valve closed
3/23/2010	1:54:41 AM	Bubbler valve closed
3/23/2010	1:54:41 AM	Helium MFC set to  0.000000
3/23/2010	1:54:41 AM	H2 MFC set to  0.000000
3/23/2010	1:54:41 AM	BCl3 MFC set to  0.000000
3/23/2010	1:54:41 AM	SiCl4 MFC set to  0.000000
3/23/2010	1:54:41 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	1:54:41 AM	Tube furnace set to 0
3/23/2010	1:54:56 AM	Helium valve closed
3/23/2010	1:54:56 AM	H2 valve closed
3/23/2010	1:54:56 AM	BCl3 valve closed
3/23/2010	1:54:56 AM	PH3 valve closed
3/23/2010	1:54:56 AM	SiCl4 pre valve closed
3/23/2010	1:54:56 AM	SiCl4 post valve closed
3/23/2010	1:54:56 AM	Main Vac valve closed
3/23/2010	1:54:56 AM	Bubbler valve closed
3/23/2010	1:54:56 AM	Bypass valve opened
3/23/2010	1:54:56 AM	Helium MFC set to  0.000000
3/23/2010	1:54:56 AM	H2 MFC set to  0.000000
3/23/2010	1:54:56 AM	BCl3 MFC set to  0.000000
3/23/2010	1:54:56 AM	SiCl4 MFC set to  0.000000
3/23/2010	1:54:56 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	1:54:56 AM	Tube furnace set to 0
3/23/2010	1:55:18 AM	Helium valve closed
3/23/2010	1:55:18 AM	H2 valve closed
3/23/2010	1:55:18 AM	BCl3 valve closed
3/23/2010	1:55:18 AM	PH3 valve closed
3/23/2010	1:55:18 AM	SiCl4 pre valve closed
3/23/2010	1:55:18 AM	SiCl4 post valve closed
3/23/2010	1:55:18 AM	Bubbler valve closed
3/23/2010	1:55:18 AM	Main Vac valve opened
3/23/2010	1:55:18 AM	Bypass valve opened
3/23/2010	1:55:18 AM	Helium MFC set to  0.000000
3/23/2010	1:55:18 AM	H2 MFC set to  0.000000
3/23/2010	1:55:18 AM	BCl3 MFC set to  0.000000
3/23/2010	1:55:18 AM	SiCl4 MFC set to  0.000000
3/23/2010	1:55:18 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	1:55:18 AM	Tube furnace set to 0
3/23/2010	2:00:18 AM	H2 valve closed
3/23/2010	2:00:18 AM	BCl3 valve closed
3/23/2010	2:00:18 AM	PH3 valve closed
3/23/2010	2:00:18 AM	SiCl4 pre valve closed
3/23/2010	2:00:18 AM	SiCl4 post valve closed
3/23/2010	2:00:18 AM	Main Vac valve closed
3/23/2010	2:00:18 AM	Bypass valve closed
3/23/2010	2:00:18 AM	Bubbler valve closed
3/23/2010	2:00:18 AM	Helium valve opened
3/23/2010	2:00:18 AM	Helium MFC set to  500.000000
3/23/2010	2:00:18 AM	H2 MFC set to  0.000000
3/23/2010	2:00:18 AM	BCl3 MFC set to  0.000000
3/23/2010	2:00:18 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:00:18 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:00:18 AM	Tube furnace set to 0
3/23/2010	2:01:38 AM	Helium valve closed
3/23/2010	2:01:38 AM	H2 valve closed
3/23/2010	2:01:38 AM	BCl3 valve closed
3/23/2010	2:01:38 AM	PH3 valve closed
3/23/2010	2:01:38 AM	SiCl4 pre valve closed
3/23/2010	2:01:38 AM	SiCl4 post valve closed
3/23/2010	2:01:38 AM	Main Vac valve closed
3/23/2010	2:01:38 AM	Bypass valve closed
3/23/2010	2:01:38 AM	Bubbler valve closed
3/23/2010	2:01:38 AM	Helium MFC set to  0.000000
3/23/2010	2:01:38 AM	H2 MFC set to  0.000000
3/23/2010	2:01:38 AM	BCl3 MFC set to  0.000000
3/23/2010	2:01:38 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:01:38 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:01:38 AM	Tube furnace set to 0
3/23/2010	2:01:54 AM	Helium valve closed
3/23/2010	2:01:54 AM	H2 valve closed
3/23/2010	2:01:54 AM	BCl3 valve closed
3/23/2010	2:01:54 AM	PH3 valve closed
3/23/2010	2:01:54 AM	SiCl4 pre valve closed
3/23/2010	2:01:54 AM	SiCl4 post valve closed
3/23/2010	2:01:54 AM	Main Vac valve closed
3/23/2010	2:01:54 AM	Bubbler valve closed
3/23/2010	2:01:54 AM	Bypass valve opened
3/23/2010	2:01:54 AM	Helium MFC set to  0.000000
3/23/2010	2:01:54 AM	H2 MFC set to  0.000000
3/23/2010	2:01:54 AM	BCl3 MFC set to  0.000000
3/23/2010	2:01:54 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:01:54 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:01:54 AM	Tube furnace set to 0
3/23/2010	2:02:16 AM	Helium valve closed
3/23/2010	2:02:16 AM	H2 valve closed
3/23/2010	2:02:16 AM	BCl3 valve closed
3/23/2010	2:02:16 AM	PH3 valve closed
3/23/2010	2:02:16 AM	SiCl4 pre valve closed
3/23/2010	2:02:16 AM	SiCl4 post valve closed
3/23/2010	2:02:16 AM	Bubbler valve closed
3/23/2010	2:02:16 AM	Main Vac valve opened
3/23/2010	2:02:16 AM	Bypass valve opened
3/23/2010	2:02:16 AM	Helium MFC set to  0.000000
3/23/2010	2:02:16 AM	H2 MFC set to  0.000000
3/23/2010	2:02:16 AM	BCl3 MFC set to  0.000000
3/23/2010	2:02:16 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:02:16 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:02:16 AM	Tube furnace set to 0
3/23/2010	2:05:11 AM	H2 valve closed
3/23/2010	2:05:11 AM	BCl3 valve closed
3/23/2010	2:05:11 AM	PH3 valve closed
3/23/2010	2:05:11 AM	SiCl4 pre valve closed
3/23/2010	2:05:11 AM	SiCl4 post valve closed
3/23/2010	2:05:11 AM	Main Vac valve closed
3/23/2010	2:05:11 AM	Bypass valve closed
3/23/2010	2:05:11 AM	Bubbler valve closed
3/23/2010	2:05:11 AM	Helium valve opened
3/23/2010	2:05:11 AM	Helium MFC set to  500.000000
3/23/2010	2:05:11 AM	H2 MFC set to  0.000000
3/23/2010	2:05:11 AM	BCl3 MFC set to  0.000000
3/23/2010	2:05:11 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:05:11 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:05:11 AM	Tube furnace set to 0
3/23/2010	2:06:32 AM	Helium valve closed
3/23/2010	2:06:32 AM	H2 valve closed
3/23/2010	2:06:32 AM	BCl3 valve closed
3/23/2010	2:06:32 AM	PH3 valve closed
3/23/2010	2:06:32 AM	SiCl4 pre valve closed
3/23/2010	2:06:32 AM	SiCl4 post valve closed
3/23/2010	2:06:32 AM	Main Vac valve closed
3/23/2010	2:06:32 AM	Bypass valve closed
3/23/2010	2:06:32 AM	Bubbler valve closed
3/23/2010	2:06:32 AM	Helium MFC set to  0.000000
3/23/2010	2:06:32 AM	H2 MFC set to  0.000000
3/23/2010	2:06:32 AM	BCl3 MFC set to  0.000000
3/23/2010	2:06:32 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:06:32 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:06:32 AM	Tube furnace set to 0
3/23/2010	2:06:47 AM	Helium valve closed
3/23/2010	2:06:47 AM	H2 valve closed
3/23/2010	2:06:47 AM	BCl3 valve closed
3/23/2010	2:06:47 AM	PH3 valve closed
3/23/2010	2:06:47 AM	SiCl4 pre valve closed
3/23/2010	2:06:47 AM	SiCl4 post valve closed
3/23/2010	2:06:47 AM	Main Vac valve closed
3/23/2010	2:06:47 AM	Bubbler valve closed
3/23/2010	2:06:47 AM	Bypass valve opened
3/23/2010	2:06:47 AM	Helium MFC set to  0.000000
3/23/2010	2:06:47 AM	H2 MFC set to  0.000000
3/23/2010	2:06:47 AM	BCl3 MFC set to  0.000000
3/23/2010	2:06:47 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:06:47 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:06:47 AM	Tube furnace set to 0
3/23/2010	2:07:09 AM	Helium valve closed
3/23/2010	2:07:09 AM	H2 valve closed
3/23/2010	2:07:09 AM	BCl3 valve closed
3/23/2010	2:07:09 AM	PH3 valve closed
3/23/2010	2:07:09 AM	SiCl4 pre valve closed
3/23/2010	2:07:09 AM	SiCl4 post valve closed
3/23/2010	2:07:09 AM	Bubbler valve closed
3/23/2010	2:07:09 AM	Main Vac valve opened
3/23/2010	2:07:09 AM	Bypass valve opened
3/23/2010	2:07:09 AM	Helium MFC set to  0.000000
3/23/2010	2:07:09 AM	H2 MFC set to  0.000000
3/23/2010	2:07:09 AM	BCl3 MFC set to  0.000000
3/23/2010	2:07:10 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:07:10 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:07:10 AM	Tube furnace set to 0
3/23/2010	2:08:39 AM	Run aborted at 2:08 AM
3/23/2010	2:08:39 AM	Helium valve closed
3/23/2010	2:08:39 AM	H2 valve closed
3/23/2010	2:08:39 AM	BCl3 valve closed
3/23/2010	2:08:39 AM	PH3 valve closed
3/23/2010	2:08:39 AM	SiCl4 pre valve closed
3/23/2010	2:08:39 AM	SiCl4 post valve closed
3/23/2010	2:08:39 AM	Bypass valve closed
3/23/2010	2:08:39 AM	Main Vac valve closed
3/23/2010	2:08:39 AM	Bubbler valve closed
3/23/2010	2:08:39 AM	Helium MFC set to  0.000000
3/23/2010	2:08:39 AM	H2 MFC set to  0.000000
3/23/2010	2:08:39 AM	BCl3 MFC set to  0.000000
3/23/2010	2:08:39 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:08:39 AM	Tube furnace set to 0
3/23/2010	2:08:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/23/2010	2:09:02 AM	Recipe started at 2:09 AM
3/23/2010	2:09:02 AM	Helium valve closed
3/23/2010	2:09:02 AM	BCl3 valve closed
3/23/2010	2:09:02 AM	PH3 valve closed
3/23/2010	2:09:02 AM	SiCl4 pre valve closed
3/23/2010	2:09:02 AM	SiCl4 post valve closed
3/23/2010	2:09:02 AM	Main Vac valve closed
3/23/2010	2:09:02 AM	Bypass valve closed
3/23/2010	2:09:02 AM	Bubbler valve closed
3/23/2010	2:09:02 AM	H2 valve opened
3/23/2010	2:09:02 AM	Helium MFC set to  0.000000
3/23/2010	2:09:02 AM	H2 MFC set to  500.000000
3/23/2010	2:09:02 AM	BCl3 MFC set to  0.000000
3/23/2010	2:09:02 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:09:02 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:09:02 AM	Tube furnace set to 0
3/23/2010	2:10:22 AM	Helium valve closed
3/23/2010	2:10:22 AM	BCl3 valve closed
3/23/2010	2:10:22 AM	PH3 valve closed
3/23/2010	2:10:22 AM	SiCl4 pre valve closed
3/23/2010	2:10:22 AM	SiCl4 post valve closed
3/23/2010	2:10:22 AM	Main Vac valve closed
3/23/2010	2:10:22 AM	Bypass valve closed
3/23/2010	2:10:22 AM	H2 valve opened
3/23/2010	2:10:22 AM	Bubbler valve opened
3/23/2010	2:10:22 AM	Helium MFC set to  0.000000
3/23/2010	2:10:22 AM	H2 MFC set to  500.000000
3/23/2010	2:10:22 AM	BCl3 MFC set to  0.000000
3/23/2010	2:10:22 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:10:22 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:10:22 AM	Tube furnace set to 0
3/23/2010	2:30:22 AM	Helium valve closed
3/23/2010	2:30:22 AM	BCl3 valve closed
3/23/2010	2:30:22 AM	PH3 valve closed
3/23/2010	2:30:22 AM	Main Vac valve closed
3/23/2010	2:30:22 AM	Bypass valve closed
3/23/2010	2:30:22 AM	H2 valve opened
3/23/2010	2:30:22 AM	SiCl4 pre valve opened
3/23/2010	2:30:22 AM	SiCl4 post valve opened
3/23/2010	2:30:22 AM	Bubbler valve opened
3/23/2010	2:30:22 AM	Helium MFC set to  0.000000
3/23/2010	2:30:22 AM	H2 MFC set to  500.000000
3/23/2010	2:30:22 AM	BCl3 MFC set to  0.000000
3/23/2010	2:30:22 AM	SiCl4 MFC set to  325.000000
3/23/2010	2:30:22 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:30:22 AM	Tube furnace set to 0
3/23/2010	2:37:39 AM	Run aborted at 2:37 AM
3/23/2010	2:37:39 AM	Helium valve closed
3/23/2010	2:37:39 AM	H2 valve closed
3/23/2010	2:37:39 AM	BCl3 valve closed
3/23/2010	2:37:39 AM	PH3 valve closed
3/23/2010	2:37:39 AM	SiCl4 pre valve closed
3/23/2010	2:37:39 AM	SiCl4 post valve closed
3/23/2010	2:37:39 AM	Bypass valve closed
3/23/2010	2:37:39 AM	Main Vac valve closed
3/23/2010	2:37:39 AM	Bubbler valve closed
3/23/2010	2:37:39 AM	Helium MFC set to  0.000000
3/23/2010	2:37:39 AM	H2 MFC set to  0.000000
3/23/2010	2:37:39 AM	BCl3 MFC set to  0.000000
3/23/2010	2:37:39 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:37:39 AM	Tube furnace set to 0
3/23/2010	2:37:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/23/2010	2:37:56 AM	Recipe started at 2:37 AM
3/23/2010	2:37:56 AM	Helium valve closed
3/23/2010	2:37:56 AM	H2 valve closed
3/23/2010	2:37:56 AM	BCl3 valve closed
3/23/2010	2:37:56 AM	PH3 valve closed
3/23/2010	2:37:56 AM	SiCl4 pre valve closed
3/23/2010	2:37:56 AM	SiCl4 post valve closed
3/23/2010	2:37:56 AM	Main Vac valve closed
3/23/2010	2:37:56 AM	Bypass valve closed
3/23/2010	2:37:56 AM	Bubbler valve closed
3/23/2010	2:37:56 AM	Helium MFC set to  0.000000
3/23/2010	2:37:56 AM	H2 MFC set to  0.000000
3/23/2010	2:37:56 AM	BCl3 MFC set to  0.000000
3/23/2010	2:37:56 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:37:56 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:37:56 AM	Tube furnace set to 0
3/23/2010	2:37:57 AM	Run finished at 2:37 AM
3/23/2010	2:37:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/23/2010	2:38:02 AM	H2 MFC set to  500.000000
3/23/2010	2:38:13 AM	H2 valve opened
3/23/2010	2:38:18 AM	Bubbler valve opened
3/23/2010	2:38:27 AM	SiCl4 MFC set to  325.000000
3/23/2010	2:38:42 AM	SiCl4 pre valve opened
3/23/2010	2:38:45 AM	SiCl4 post valve opened
3/23/2010	2:39:28 AM	SiCl4 post valve closed
3/23/2010	2:39:29 AM	SiCl4 pre valve closed
3/23/2010	2:39:47 AM	SiCl4 post valve opened
3/23/2010	2:39:49 AM	SiCl4 pre valve opened
3/23/2010	2:40:18 AM	SiCl4 MFC set to  400.000000
3/23/2010	2:42:38 AM	SiCl4 pre valve closed
3/23/2010	2:42:39 AM	SiCl4 post valve closed
3/23/2010	2:42:42 AM	SiCl4 pre valve opened
3/23/2010	2:42:43 AM	SiCl4 post valve opened
3/23/2010	2:42:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/23/2010	2:42:54 AM	Recipe started at 2:42 AM
3/23/2010	2:42:54 AM	Helium valve closed
3/23/2010	2:42:54 AM	H2 valve closed
3/23/2010	2:42:54 AM	BCl3 valve closed
3/23/2010	2:42:54 AM	PH3 valve closed
3/23/2010	2:42:54 AM	SiCl4 pre valve closed
3/23/2010	2:42:54 AM	SiCl4 post valve closed
3/23/2010	2:42:54 AM	Main Vac valve closed
3/23/2010	2:42:54 AM	Bypass valve closed
3/23/2010	2:42:54 AM	Bubbler valve closed
3/23/2010	2:42:54 AM	Helium MFC set to  0.000000
3/23/2010	2:42:54 AM	H2 MFC set to  0.000000
3/23/2010	2:42:54 AM	BCl3 MFC set to  0.000000
3/23/2010	2:42:54 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:42:54 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:42:54 AM	Tube furnace set to 0
3/23/2010	2:42:55 AM	Run finished at 2:42 AM
3/23/2010	2:42:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/23/2010	2:43:09 AM	Helium MFC set to  500.000000
3/23/2010	2:43:10 AM	Helium valve opened
3/23/2010	2:43:12 AM	Bubbler valve opened
3/23/2010	2:45:38 AM	Bubbler valve closed
3/23/2010	2:45:39 AM	Helium valve closed
3/23/2010	2:48:02 AM	Program exited cleanly
3/23/2010	2:48:04 AM	Program started normally
3/23/2010	2:48:04 AM	Helium valve closed
3/23/2010	2:48:04 AM	H2 valve closed
3/23/2010	2:48:04 AM	BCl3 valve closed
3/23/2010	2:48:04 AM	PH3 valve closed
3/23/2010	2:48:04 AM	SiCl4 pre valve closed
3/23/2010	2:48:04 AM	SiCl4 post valve closed
3/23/2010	2:48:04 AM	Main Vac valve closed
3/23/2010	2:48:04 AM	Bypass valve closed
3/23/2010	2:48:04 AM	Bubbler valve closed
3/23/2010	2:48:04 AM	Helium MFC set to  0.000000
3/23/2010	2:48:04 AM	H2 MFC set to  0.000000
3/23/2010	2:48:04 AM	BCl3 MFC set to  0.000000
3/23/2010	2:48:04 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:48:04 AM	Bypass solenoid MFC set to  760.000000
3/23/2010	2:48:04 AM	Tube furnace set to 0
3/23/2010	2:48:11 AM	Helium valve opened
3/23/2010	2:48:16 AM	Helium MFC set to  200.000000
3/23/2010	2:48:22 AM	Bubbler valve opened
3/23/2010	2:48:32 AM	SiCl4 MFC set to  10.000000
3/23/2010	2:48:37 AM	SiCl4 MFC set to  150.000000
3/23/2010	2:49:02 AM	SiCl4 pre valve opened
3/23/2010	2:49:03 AM	SiCl4 post valve opened
3/23/2010	2:49:39 AM	SiCl4 post valve closed
3/23/2010	2:49:40 AM	SiCl4 pre valve closed
3/23/2010	2:49:44 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:50:10 AM	Recipe started at 2:50 AM
3/23/2010	2:50:10 AM	Helium valve closed
3/23/2010	2:50:10 AM	BCl3 valve closed
3/23/2010	2:50:10 AM	PH3 valve closed
3/23/2010	2:50:10 AM	SiCl4 pre valve closed
3/23/2010	2:50:10 AM	SiCl4 post valve closed
3/23/2010	2:50:10 AM	Main Vac valve closed
3/23/2010	2:50:10 AM	Bypass valve closed
3/23/2010	2:50:10 AM	Bubbler valve closed
3/23/2010	2:50:10 AM	H2 valve opened
3/23/2010	2:50:10 AM	Helium MFC set to  0.000000
3/23/2010	2:50:10 AM	H2 MFC set to  500.000000
3/23/2010	2:50:10 AM	BCl3 MFC set to  0.000000
3/23/2010	2:50:10 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:50:10 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:50:10 AM	Tube furnace set to 0
3/23/2010	2:50:12 AM	Helium valve closed
3/23/2010	2:50:12 AM	BCl3 valve closed
3/23/2010	2:50:12 AM	PH3 valve closed
3/23/2010	2:50:12 AM	Main Vac valve closed
3/23/2010	2:50:12 AM	Bypass valve closed
3/23/2010	2:50:12 AM	H2 valve opened
3/23/2010	2:50:12 AM	SiCl4 pre valve opened
3/23/2010	2:50:12 AM	SiCl4 post valve opened
3/23/2010	2:50:12 AM	Bubbler valve opened
3/23/2010	2:50:12 AM	Helium MFC set to  0.000000
3/23/2010	2:50:12 AM	H2 MFC set to  500.000000
3/23/2010	2:50:12 AM	BCl3 MFC set to  0.000000
3/23/2010	2:50:12 AM	SiCl4 MFC set to  325.000000
3/23/2010	2:50:12 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:50:12 AM	Tube furnace set to 0
3/23/2010	2:51:52 AM	Run aborted at 2:51 AM
3/23/2010	2:51:52 AM	Helium valve closed
3/23/2010	2:51:52 AM	H2 valve closed
3/23/2010	2:51:52 AM	BCl3 valve closed
3/23/2010	2:51:52 AM	PH3 valve closed
3/23/2010	2:51:52 AM	SiCl4 pre valve closed
3/23/2010	2:51:52 AM	SiCl4 post valve closed
3/23/2010	2:51:52 AM	Bypass valve closed
3/23/2010	2:51:52 AM	Main Vac valve closed
3/23/2010	2:51:52 AM	Bubbler valve closed
3/23/2010	2:51:52 AM	Helium MFC set to  0.000000
3/23/2010	2:51:52 AM	H2 MFC set to  0.000000
3/23/2010	2:51:52 AM	BCl3 MFC set to  0.000000
3/23/2010	2:51:52 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:51:52 AM	Tube furnace set to 0
3/23/2010	2:52:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/23/2010	2:52:11 AM	Recipe started at 2:52 AM
3/23/2010	2:52:11 AM	Helium valve closed
3/23/2010	2:52:11 AM	H2 valve closed
3/23/2010	2:52:11 AM	BCl3 valve closed
3/23/2010	2:52:11 AM	PH3 valve closed
3/23/2010	2:52:11 AM	SiCl4 pre valve closed
3/23/2010	2:52:11 AM	SiCl4 post valve closed
3/23/2010	2:52:11 AM	Main Vac valve closed
3/23/2010	2:52:11 AM	Bypass valve closed
3/23/2010	2:52:11 AM	Bubbler valve closed
3/23/2010	2:52:11 AM	Helium MFC set to  0.000000
3/23/2010	2:52:11 AM	H2 MFC set to  0.000000
3/23/2010	2:52:11 AM	BCl3 MFC set to  0.000000
3/23/2010	2:52:11 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:52:11 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:52:11 AM	Tube furnace set to 0
3/23/2010	2:52:11 AM	Run finished at 2:52 AM
3/23/2010	2:52:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/23/2010	2:52:16 AM	Helium MFC set to  500.000000
3/23/2010	2:52:17 AM	Helium valve opened
3/23/2010	2:52:21 AM	Bubbler valve opened
3/23/2010	2:53:16 AM	Bubbler valve closed
3/23/2010	2:53:18 AM	Bubbler valve opened
3/23/2010	2:53:21 AM	Bubbler valve closed
3/23/2010	2:53:23 AM	Bubbler valve opened
3/23/2010	2:53:42 AM	SiCl4 MFC set to  300.000000
3/23/2010	2:53:44 AM	SiCl4 pre valve opened
3/23/2010	2:53:45 AM	SiCl4 post valve opened
3/23/2010	2:53:51 AM	SiCl4 MFC set to  300.000000
3/23/2010	2:53:55 AM	SiCl4 post valve closed
3/23/2010	2:53:56 AM	SiCl4 pre valve closed
3/23/2010	2:53:58 AM	SiCl4 pre valve opened
3/23/2010	2:53:59 AM	SiCl4 post valve opened
3/23/2010	2:54:07 AM	SiCl4 post valve closed
3/23/2010	2:54:08 AM	SiCl4 pre valve closed
3/23/2010	2:54:18 AM	Helium valve closed
3/23/2010	2:54:18 AM	H2 valve closed
3/23/2010	2:54:18 AM	BCl3 valve closed
3/23/2010	2:54:18 AM	PH3 valve closed
3/23/2010	2:54:18 AM	SiCl4 pre valve closed
3/23/2010	2:54:18 AM	SiCl4 post valve closed
3/23/2010	2:54:18 AM	Main Vac valve closed
3/23/2010	2:54:18 AM	Bubbler valve closed
3/23/2010	2:54:18 AM	Bypass valve opened
3/23/2010	2:54:18 AM	Helium MFC set to  0.000000
3/23/2010	2:54:18 AM	H2 MFC set to  0.000000
3/23/2010	2:54:18 AM	BCl3 MFC set to  0.000000
3/23/2010	2:54:18 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:54:18 AM	Bypass solenoid MFC set to  760.000000
3/23/2010	2:54:18 AM	Tube furnace set to 0
3/23/2010	2:54:18 AM	Baratron reads 913.838257 Torr.  Emergency exit.
3/23/2010	2:54:24 AM	Program exited cleanly
3/23/2010	2:54:30 AM	Program started normally
3/23/2010	2:54:30 AM	Helium valve closed
3/23/2010	2:54:30 AM	H2 valve closed
3/23/2010	2:54:30 AM	BCl3 valve closed
3/23/2010	2:54:30 AM	PH3 valve closed
3/23/2010	2:54:30 AM	SiCl4 pre valve closed
3/23/2010	2:54:30 AM	SiCl4 post valve closed
3/23/2010	2:54:30 AM	Main Vac valve closed
3/23/2010	2:54:30 AM	Bypass valve closed
3/23/2010	2:54:30 AM	Bubbler valve closed
3/23/2010	2:54:30 AM	Helium MFC set to  0.000000
3/23/2010	2:54:30 AM	H2 MFC set to  0.000000
3/23/2010	2:54:30 AM	BCl3 MFC set to  0.000000
3/23/2010	2:54:30 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:54:30 AM	Bypass solenoid MFC set to  760.000000
3/23/2010	2:54:30 AM	Tube furnace set to 0
3/23/2010	2:54:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	2:54:36 AM	Recipe started at 2:54 AM
3/23/2010	2:54:36 AM	Helium valve closed
3/23/2010	2:54:36 AM	H2 valve closed
3/23/2010	2:54:36 AM	BCl3 valve closed
3/23/2010	2:54:36 AM	PH3 valve closed
3/23/2010	2:54:36 AM	SiCl4 pre valve closed
3/23/2010	2:54:36 AM	SiCl4 post valve closed
3/23/2010	2:54:36 AM	Main Vac valve closed
3/23/2010	2:54:36 AM	Bubbler valve closed
3/23/2010	2:54:36 AM	Bypass valve opened
3/23/2010	2:54:36 AM	Helium MFC set to  0.000000
3/23/2010	2:54:36 AM	H2 MFC set to  0.000000
3/23/2010	2:54:36 AM	BCl3 MFC set to  0.000000
3/23/2010	2:54:36 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:54:36 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:54:36 AM	Tube furnace set to 0
3/23/2010	2:55:03 AM	Helium valve closed
3/23/2010	2:55:03 AM	H2 valve closed
3/23/2010	2:55:03 AM	BCl3 valve closed
3/23/2010	2:55:03 AM	PH3 valve closed
3/23/2010	2:55:03 AM	SiCl4 pre valve closed
3/23/2010	2:55:03 AM	SiCl4 post valve closed
3/23/2010	2:55:03 AM	Bubbler valve closed
3/23/2010	2:55:03 AM	Main Vac valve opened
3/23/2010	2:55:03 AM	Bypass valve opened
3/23/2010	2:55:03 AM	Helium MFC set to  0.000000
3/23/2010	2:55:03 AM	H2 MFC set to  0.000000
3/23/2010	2:55:03 AM	BCl3 MFC set to  0.000000
3/23/2010	2:55:03 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:55:03 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:55:03 AM	Tube furnace set to 0
3/23/2010	2:55:03 AM	Run finished at 2:55 AM
3/23/2010	2:55:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	2:55:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	2:55:38 AM	Recipe started at 2:55 AM
3/23/2010	2:55:38 AM	H2 valve closed
3/23/2010	2:55:38 AM	BCl3 valve closed
3/23/2010	2:55:38 AM	PH3 valve closed
3/23/2010	2:55:38 AM	SiCl4 pre valve closed
3/23/2010	2:55:38 AM	SiCl4 post valve closed
3/23/2010	2:55:38 AM	Main Vac valve closed
3/23/2010	2:55:38 AM	Bypass valve closed
3/23/2010	2:55:38 AM	Bubbler valve closed
3/23/2010	2:55:38 AM	Helium valve opened
3/23/2010	2:55:38 AM	Helium MFC set to  500.000000
3/23/2010	2:55:38 AM	H2 MFC set to  0.000000
3/23/2010	2:55:38 AM	BCl3 MFC set to  0.000000
3/23/2010	2:55:38 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:55:38 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:55:38 AM	Tube furnace set to 0
3/23/2010	2:56:53 AM	Helium valve closed
3/23/2010	2:56:53 AM	H2 valve closed
3/23/2010	2:56:53 AM	BCl3 valve closed
3/23/2010	2:56:53 AM	PH3 valve closed
3/23/2010	2:56:53 AM	SiCl4 pre valve closed
3/23/2010	2:56:53 AM	SiCl4 post valve closed
3/23/2010	2:56:53 AM	Main Vac valve closed
3/23/2010	2:56:53 AM	Bypass valve closed
3/23/2010	2:56:53 AM	Bubbler valve closed
3/23/2010	2:56:53 AM	Helium MFC set to  0.000000
3/23/2010	2:56:53 AM	H2 MFC set to  0.000000
3/23/2010	2:56:53 AM	BCl3 MFC set to  0.000000
3/23/2010	2:56:53 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:56:53 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	2:56:53 AM	Tube furnace set to 0
3/23/2010	2:56:53 AM	Run finished at 2:56 AM
3/23/2010	2:56:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	2:57:16 AM	Helium MFC set to  0.000000
3/23/2010	2:57:20 AM	H2 valve opened
3/23/2010	2:57:26 AM	H2 MFC set to  100.000000
3/23/2010	2:57:36 AM	Bubbler valve opened
3/23/2010	2:58:02 AM	SiCl4 MFC set to  100.000000
3/23/2010	2:58:05 AM	SiCl4 pre valve opened
3/23/2010	2:58:06 AM	SiCl4 post valve opened
3/23/2010	2:58:10 AM	SiCl4 pre valve closed
3/23/2010	2:58:11 AM	SiCl4 pre valve opened
3/23/2010	2:58:12 AM	SiCl4 pre valve closed
3/23/2010	2:58:12 AM	SiCl4 pre valve opened
3/23/2010	2:58:14 AM	SiCl4 post valve closed
3/23/2010	2:58:14 AM	SiCl4 post valve opened
3/23/2010	2:58:17 AM	SiCl4 pre valve closed
3/23/2010	2:58:18 AM	SiCl4 post valve closed
3/23/2010	2:58:19 AM	SiCl4 post valve opened
3/23/2010	2:58:19 AM	SiCl4 pre valve opened
3/23/2010	2:59:17 AM	SiCl4 MFC set to  0.000000
3/23/2010	2:59:17 AM	SiCl4 pre valve closed
3/23/2010	2:59:18 AM	SiCl4 post valve closed
3/23/2010	2:59:40 AM	H2 valve closed
3/23/2010	2:59:47 AM	H2 MFC set to  0.000000
3/23/2010	2:59:51 AM	Helium MFC set to  200.000000
3/23/2010	2:59:51 AM	Helium valve opened
3/23/2010	3:00:01 AM	Bubbler valve closed
3/23/2010	3:00:07 AM	Helium valve closed
3/23/2010	3:00:38 AM	Bubbler valve opened
3/23/2010	3:00:40 AM	Bubbler valve closed
3/23/2010	3:01:26 AM	SiCl4 post valve opened
3/23/2010	3:01:30 AM	SiCl4 post valve closed
3/23/2010	3:01:41 AM	SiCl4 post valve opened
3/23/2010	3:01:52 AM	SiCl4 post valve closed
3/23/2010	3:02:21 AM	SiCl4 pre valve opened
3/23/2010	3:02:27 AM	SiCl4 pre valve closed
3/23/2010	3:03:43 AM	SiCl4 post valve opened
3/23/2010	3:03:44 AM	SiCl4 pre valve opened
3/23/2010	3:03:48 AM	SiCl4 post valve closed
3/23/2010	3:03:49 AM	SiCl4 pre valve closed
3/23/2010	3:03:54 AM	SiCl4 MFC set to  200.000000
3/23/2010	3:03:56 AM	SiCl4 pre valve opened
3/23/2010	3:03:58 AM	SiCl4 post valve opened
3/23/2010	3:04:06 AM	SiCl4 MFC set to  150.000000
3/23/2010	3:04:11 AM	SiCl4 pre valve closed
3/23/2010	3:04:12 AM	SiCl4 pre valve opened
3/23/2010	3:04:13 AM	SiCl4 post valve closed
3/23/2010	3:04:14 AM	SiCl4 post valve opened
3/23/2010	3:04:16 AM	SiCl4 pre valve closed
3/23/2010	3:04:16 AM	SiCl4 post valve closed
3/23/2010	3:04:19 AM	SiCl4 pre valve opened
3/23/2010	3:04:20 AM	SiCl4 post valve opened
3/23/2010	3:04:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/23/2010	3:04:33 AM	Recipe started at 3:04 AM
3/23/2010	3:04:33 AM	Helium valve closed
3/23/2010	3:04:33 AM	H2 valve closed
3/23/2010	3:04:33 AM	BCl3 valve closed
3/23/2010	3:04:33 AM	PH3 valve closed
3/23/2010	3:04:33 AM	SiCl4 pre valve closed
3/23/2010	3:04:33 AM	SiCl4 post valve closed
3/23/2010	3:04:33 AM	Main Vac valve closed
3/23/2010	3:04:33 AM	Bypass valve closed
3/23/2010	3:04:33 AM	Bubbler valve closed
3/23/2010	3:04:33 AM	Helium MFC set to  0.000000
3/23/2010	3:04:33 AM	H2 MFC set to  0.000000
3/23/2010	3:04:33 AM	BCl3 MFC set to  0.000000
3/23/2010	3:04:33 AM	SiCl4 MFC set to  0.000000
3/23/2010	3:04:33 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	3:04:33 AM	Tube furnace set to 0
3/23/2010	3:04:33 AM	Run finished at 3:04 AM
3/23/2010	3:04:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/23/2010	3:04:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	3:04:49 AM	Recipe started at 3:04 AM
3/23/2010	3:04:49 AM	Helium valve closed
3/23/2010	3:04:49 AM	H2 valve closed
3/23/2010	3:04:49 AM	BCl3 valve closed
3/23/2010	3:04:49 AM	PH3 valve closed
3/23/2010	3:04:49 AM	SiCl4 pre valve closed
3/23/2010	3:04:49 AM	SiCl4 post valve closed
3/23/2010	3:04:49 AM	Main Vac valve closed
3/23/2010	3:04:49 AM	Bubbler valve closed
3/23/2010	3:04:49 AM	Bypass valve opened
3/23/2010	3:04:49 AM	Helium MFC set to  0.000000
3/23/2010	3:04:49 AM	H2 MFC set to  0.000000
3/23/2010	3:04:49 AM	BCl3 MFC set to  0.000000
3/23/2010	3:04:49 AM	SiCl4 MFC set to  0.000000
3/23/2010	3:04:49 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	3:04:49 AM	Tube furnace set to 0
3/23/2010	3:05:07 AM	Helium valve closed
3/23/2010	3:05:07 AM	H2 valve closed
3/23/2010	3:05:07 AM	BCl3 valve closed
3/23/2010	3:05:07 AM	PH3 valve closed
3/23/2010	3:05:07 AM	SiCl4 pre valve closed
3/23/2010	3:05:07 AM	SiCl4 post valve closed
3/23/2010	3:05:07 AM	Bubbler valve closed
3/23/2010	3:05:07 AM	Main Vac valve opened
3/23/2010	3:05:07 AM	Bypass valve opened
3/23/2010	3:05:07 AM	Helium MFC set to  0.000000
3/23/2010	3:05:07 AM	H2 MFC set to  0.000000
3/23/2010	3:05:07 AM	BCl3 MFC set to  0.000000
3/23/2010	3:05:07 AM	SiCl4 MFC set to  0.000000
3/23/2010	3:05:07 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	3:05:07 AM	Tube furnace set to 0
3/23/2010	3:05:07 AM	Run finished at 3:05 AM
3/23/2010	3:05:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	7:18:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	7:18:54 AM	Recipe started at 7:18 AM
3/23/2010	7:18:54 AM	H2 valve closed
3/23/2010	7:18:54 AM	BCl3 valve closed
3/23/2010	7:18:54 AM	PH3 valve closed
3/23/2010	7:18:54 AM	SiCl4 pre valve closed
3/23/2010	7:18:54 AM	SiCl4 post valve closed
3/23/2010	7:18:54 AM	Main Vac valve closed
3/23/2010	7:18:54 AM	Bypass valve closed
3/23/2010	7:18:54 AM	Bubbler valve closed
3/23/2010	7:18:54 AM	Helium valve opened
3/23/2010	7:18:54 AM	Helium MFC set to  500.000000
3/23/2010	7:18:54 AM	H2 MFC set to  0.000000
3/23/2010	7:18:54 AM	BCl3 MFC set to  0.000000
3/23/2010	7:18:54 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:18:54 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:18:54 AM	Tube furnace set to 0
3/23/2010	7:20:13 AM	Helium valve closed
3/23/2010	7:20:13 AM	H2 valve closed
3/23/2010	7:20:13 AM	BCl3 valve closed
3/23/2010	7:20:13 AM	PH3 valve closed
3/23/2010	7:20:13 AM	SiCl4 pre valve closed
3/23/2010	7:20:13 AM	SiCl4 post valve closed
3/23/2010	7:20:13 AM	Main Vac valve closed
3/23/2010	7:20:13 AM	Bypass valve closed
3/23/2010	7:20:13 AM	Bubbler valve closed
3/23/2010	7:20:13 AM	Helium MFC set to  0.000000
3/23/2010	7:20:13 AM	H2 MFC set to  0.000000
3/23/2010	7:20:13 AM	BCl3 MFC set to  0.000000
3/23/2010	7:20:13 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:20:13 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:20:13 AM	Tube furnace set to 0
3/23/2010	7:20:14 AM	Run finished at 7:20 AM
3/23/2010	7:20:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	7:20:28 AM	H2 MFC set to  500.000000
3/23/2010	7:20:30 AM	H2 valve opened
3/23/2010	7:20:35 AM	Bubbler valve opened
3/23/2010	7:20:48 AM	SiCl4 MFC set to  250.000000
3/23/2010	7:20:54 AM	SiCl4 pre valve opened
3/23/2010	7:20:57 AM	SiCl4 post valve opened
3/23/2010	7:21:11 AM	SiCl4 post valve closed
3/23/2010	7:21:13 AM	SiCl4 pre valve closed
3/23/2010	7:21:14 AM	SiCl4 pre valve opened
3/23/2010	7:21:15 AM	SiCl4 post valve opened
3/23/2010	7:21:16 AM	SiCl4 post valve closed
3/23/2010	7:21:17 AM	SiCl4 pre valve closed
3/23/2010	7:21:20 AM	H2 valve closed
3/23/2010	7:21:23 AM	Helium valve opened
3/23/2010	7:21:30 AM	Helium MFC set to  500.000000
3/23/2010	7:21:35 AM	Bubbler valve closed
3/23/2010	7:21:39 AM	Bubbler valve opened
3/23/2010	7:23:29 AM	H2 valve opened
3/23/2010	7:23:30 AM	Helium valve closed
3/23/2010	7:23:40 AM	SiCl4 post valve opened
3/23/2010	7:23:43 AM	SiCl4 pre valve opened
3/23/2010	7:23:46 AM	SiCl4 post valve closed
3/23/2010	7:23:47 AM	SiCl4 pre valve closed
3/23/2010	7:23:49 AM	SiCl4 pre valve opened
3/23/2010	7:23:49 AM	SiCl4 post valve opened
3/23/2010	7:23:52 AM	SiCl4 post valve closed
3/23/2010	7:23:53 AM	SiCl4 pre valve closed
3/23/2010	7:24:03 AM	H2 valve closed
3/23/2010	7:24:05 AM	Bubbler valve closed
3/23/2010	7:24:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	7:24:39 AM	Recipe started at 7:24 AM
3/23/2010	7:24:39 AM	Helium valve closed
3/23/2010	7:24:39 AM	H2 valve closed
3/23/2010	7:24:39 AM	BCl3 valve closed
3/23/2010	7:24:39 AM	PH3 valve closed
3/23/2010	7:24:39 AM	SiCl4 pre valve closed
3/23/2010	7:24:39 AM	SiCl4 post valve closed
3/23/2010	7:24:39 AM	Main Vac valve closed
3/23/2010	7:24:39 AM	Bubbler valve closed
3/23/2010	7:24:39 AM	Bypass valve opened
3/23/2010	7:24:39 AM	Helium MFC set to  0.000000
3/23/2010	7:24:39 AM	H2 MFC set to  0.000000
3/23/2010	7:24:39 AM	BCl3 MFC set to  0.000000
3/23/2010	7:24:39 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:24:39 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:24:39 AM	Tube furnace set to 0
3/23/2010	7:24:56 AM	Helium valve closed
3/23/2010	7:24:56 AM	H2 valve closed
3/23/2010	7:24:56 AM	BCl3 valve closed
3/23/2010	7:24:56 AM	PH3 valve closed
3/23/2010	7:24:56 AM	SiCl4 pre valve closed
3/23/2010	7:24:56 AM	SiCl4 post valve closed
3/23/2010	7:24:56 AM	Bubbler valve closed
3/23/2010	7:24:56 AM	Main Vac valve opened
3/23/2010	7:24:56 AM	Bypass valve opened
3/23/2010	7:24:56 AM	Helium MFC set to  0.000000
3/23/2010	7:24:56 AM	H2 MFC set to  0.000000
3/23/2010	7:24:56 AM	BCl3 MFC set to  0.000000
3/23/2010	7:24:56 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:24:56 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:24:56 AM	Tube furnace set to 0
3/23/2010	7:24:56 AM	Run finished at 7:24 AM
3/23/2010	7:24:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	7:26:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	7:26:54 AM	Recipe started at 7:26 AM
3/23/2010	7:26:54 AM	H2 valve closed
3/23/2010	7:26:54 AM	BCl3 valve closed
3/23/2010	7:26:54 AM	PH3 valve closed
3/23/2010	7:26:54 AM	SiCl4 pre valve closed
3/23/2010	7:26:54 AM	SiCl4 post valve closed
3/23/2010	7:26:54 AM	Main Vac valve closed
3/23/2010	7:26:55 AM	Bypass valve closed
3/23/2010	7:26:55 AM	Bubbler valve closed
3/23/2010	7:26:55 AM	Helium valve opened
3/23/2010	7:26:55 AM	Helium MFC set to  500.000000
3/23/2010	7:26:55 AM	H2 MFC set to  0.000000
3/23/2010	7:26:55 AM	BCl3 MFC set to  0.000000
3/23/2010	7:26:55 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:26:55 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:26:55 AM	Tube furnace set to 0
3/23/2010	7:28:14 AM	Helium valve closed
3/23/2010	7:28:14 AM	H2 valve closed
3/23/2010	7:28:14 AM	BCl3 valve closed
3/23/2010	7:28:14 AM	PH3 valve closed
3/23/2010	7:28:14 AM	SiCl4 pre valve closed
3/23/2010	7:28:14 AM	SiCl4 post valve closed
3/23/2010	7:28:14 AM	Main Vac valve closed
3/23/2010	7:28:14 AM	Bypass valve closed
3/23/2010	7:28:14 AM	Bubbler valve closed
3/23/2010	7:28:14 AM	Helium MFC set to  0.000000
3/23/2010	7:28:14 AM	H2 MFC set to  0.000000
3/23/2010	7:28:14 AM	BCl3 MFC set to  0.000000
3/23/2010	7:28:14 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:28:14 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:28:14 AM	Tube furnace set to 0
3/23/2010	7:28:15 AM	Run finished at 7:28 AM
3/23/2010	7:28:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	7:31:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	7:31:55 AM	Recipe started at 7:31 AM
3/23/2010	7:31:55 AM	Helium valve closed
3/23/2010	7:31:55 AM	H2 valve closed
3/23/2010	7:31:55 AM	BCl3 valve closed
3/23/2010	7:31:55 AM	PH3 valve closed
3/23/2010	7:31:55 AM	SiCl4 pre valve closed
3/23/2010	7:31:55 AM	SiCl4 post valve closed
3/23/2010	7:31:55 AM	Main Vac valve closed
3/23/2010	7:31:55 AM	Bubbler valve closed
3/23/2010	7:31:55 AM	Bypass valve opened
3/23/2010	7:31:55 AM	Helium MFC set to  0.000000
3/23/2010	7:31:55 AM	H2 MFC set to  0.000000
3/23/2010	7:31:55 AM	BCl3 MFC set to  0.000000
3/23/2010	7:31:55 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:31:55 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:31:55 AM	Tube furnace set to 0
3/23/2010	7:32:26 AM	Helium valve closed
3/23/2010	7:32:26 AM	H2 valve closed
3/23/2010	7:32:26 AM	BCl3 valve closed
3/23/2010	7:32:26 AM	PH3 valve closed
3/23/2010	7:32:26 AM	SiCl4 pre valve closed
3/23/2010	7:32:26 AM	SiCl4 post valve closed
3/23/2010	7:32:26 AM	Bubbler valve closed
3/23/2010	7:32:26 AM	Main Vac valve opened
3/23/2010	7:32:26 AM	Bypass valve opened
3/23/2010	7:32:26 AM	Helium MFC set to  0.000000
3/23/2010	7:32:26 AM	H2 MFC set to  0.000000
3/23/2010	7:32:26 AM	BCl3 MFC set to  0.000000
3/23/2010	7:32:26 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:32:26 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:32:26 AM	Tube furnace set to 0
3/23/2010	7:32:27 AM	Run finished at 7:32 AM
3/23/2010	7:32:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	7:33:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/23/2010	7:33:16 AM	Recipe started at 7:33 AM
3/23/2010	7:33:16 AM	H2 valve closed
3/23/2010	7:33:16 AM	BCl3 valve closed
3/23/2010	7:33:16 AM	PH3 valve closed
3/23/2010	7:33:16 AM	SiCl4 pre valve closed
3/23/2010	7:33:16 AM	SiCl4 post valve closed
3/23/2010	7:33:16 AM	Main Vac valve closed
3/23/2010	7:33:16 AM	Bypass valve closed
3/23/2010	7:33:16 AM	Bubbler valve closed
3/23/2010	7:33:16 AM	Helium valve opened
3/23/2010	7:33:16 AM	Helium MFC set to  500.000000
3/23/2010	7:33:16 AM	H2 MFC set to  0.000000
3/23/2010	7:33:16 AM	BCl3 MFC set to  0.000000
3/23/2010	7:33:16 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:33:16 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:33:16 AM	Tube furnace set to 0
3/23/2010	7:34:38 AM	Helium valve closed
3/23/2010	7:34:38 AM	H2 valve closed
3/23/2010	7:34:38 AM	BCl3 valve closed
3/23/2010	7:34:38 AM	PH3 valve closed
3/23/2010	7:34:38 AM	SiCl4 pre valve closed
3/23/2010	7:34:38 AM	SiCl4 post valve closed
3/23/2010	7:34:38 AM	Main Vac valve closed
3/23/2010	7:34:38 AM	Bypass valve closed
3/23/2010	7:34:38 AM	Bubbler valve closed
3/23/2010	7:34:38 AM	Helium MFC set to  0.000000
3/23/2010	7:34:38 AM	H2 MFC set to  0.000000
3/23/2010	7:34:38 AM	BCl3 MFC set to  0.000000
3/23/2010	7:34:38 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:34:38 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:34:38 AM	Tube furnace set to 0
3/23/2010	7:34:54 AM	Helium valve closed
3/23/2010	7:34:54 AM	H2 valve closed
3/23/2010	7:34:54 AM	BCl3 valve closed
3/23/2010	7:34:54 AM	PH3 valve closed
3/23/2010	7:34:54 AM	SiCl4 pre valve closed
3/23/2010	7:34:54 AM	SiCl4 post valve closed
3/23/2010	7:34:54 AM	Main Vac valve closed
3/23/2010	7:34:54 AM	Bubbler valve closed
3/23/2010	7:34:54 AM	Bypass valve opened
3/23/2010	7:34:54 AM	Helium MFC set to  0.000000
3/23/2010	7:34:54 AM	H2 MFC set to  0.000000
3/23/2010	7:34:54 AM	BCl3 MFC set to  0.000000
3/23/2010	7:34:54 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:34:54 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:34:54 AM	Tube furnace set to 0
3/23/2010	7:35:17 AM	Helium valve closed
3/23/2010	7:35:17 AM	H2 valve closed
3/23/2010	7:35:17 AM	BCl3 valve closed
3/23/2010	7:35:17 AM	PH3 valve closed
3/23/2010	7:35:17 AM	SiCl4 pre valve closed
3/23/2010	7:35:17 AM	SiCl4 post valve closed
3/23/2010	7:35:17 AM	Bubbler valve closed
3/23/2010	7:35:17 AM	Main Vac valve opened
3/23/2010	7:35:17 AM	Bypass valve opened
3/23/2010	7:35:17 AM	Helium MFC set to  0.000000
3/23/2010	7:35:17 AM	H2 MFC set to  0.000000
3/23/2010	7:35:17 AM	BCl3 MFC set to  0.000000
3/23/2010	7:35:17 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:35:17 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:35:17 AM	Tube furnace set to 0
3/23/2010	7:39:38 AM	Run aborted at 7:39 AM
3/23/2010	7:39:38 AM	Helium valve closed
3/23/2010	7:39:38 AM	H2 valve closed
3/23/2010	7:39:38 AM	BCl3 valve closed
3/23/2010	7:39:38 AM	PH3 valve closed
3/23/2010	7:39:38 AM	SiCl4 pre valve closed
3/23/2010	7:39:38 AM	SiCl4 post valve closed
3/23/2010	7:39:38 AM	Bypass valve closed
3/23/2010	7:39:38 AM	Main Vac valve closed
3/23/2010	7:39:38 AM	Bubbler valve closed
3/23/2010	7:39:38 AM	Helium MFC set to  0.000000
3/23/2010	7:39:38 AM	H2 MFC set to  0.000000
3/23/2010	7:39:38 AM	BCl3 MFC set to  0.000000
3/23/2010	7:39:38 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:39:38 AM	Tube furnace set to 0
3/23/2010	7:39:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/23/2010	7:39:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	7:39:42 AM	Recipe started at 7:39 AM
3/23/2010	7:39:42 AM	H2 valve closed
3/23/2010	7:39:42 AM	BCl3 valve closed
3/23/2010	7:39:42 AM	PH3 valve closed
3/23/2010	7:39:42 AM	SiCl4 pre valve closed
3/23/2010	7:39:42 AM	SiCl4 post valve closed
3/23/2010	7:39:42 AM	Main Vac valve closed
3/23/2010	7:39:42 AM	Bypass valve closed
3/23/2010	7:39:42 AM	Bubbler valve closed
3/23/2010	7:39:42 AM	Helium valve opened
3/23/2010	7:39:42 AM	Helium MFC set to  500.000000
3/23/2010	7:39:42 AM	H2 MFC set to  0.000000
3/23/2010	7:39:42 AM	BCl3 MFC set to  0.000000
3/23/2010	7:39:42 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:39:42 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:39:42 AM	Tube furnace set to 0
3/23/2010	7:41:02 AM	Helium valve closed
3/23/2010	7:41:02 AM	H2 valve closed
3/23/2010	7:41:02 AM	BCl3 valve closed
3/23/2010	7:41:02 AM	PH3 valve closed
3/23/2010	7:41:02 AM	SiCl4 pre valve closed
3/23/2010	7:41:02 AM	SiCl4 post valve closed
3/23/2010	7:41:02 AM	Main Vac valve closed
3/23/2010	7:41:02 AM	Bypass valve closed
3/23/2010	7:41:02 AM	Bubbler valve closed
3/23/2010	7:41:02 AM	Helium MFC set to  0.000000
3/23/2010	7:41:02 AM	H2 MFC set to  0.000000
3/23/2010	7:41:02 AM	BCl3 MFC set to  0.000000
3/23/2010	7:41:02 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:41:02 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:41:02 AM	Tube furnace set to 0
3/23/2010	7:41:02 AM	Run finished at 7:41 AM
3/23/2010	7:41:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	7:41:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/23/2010	7:41:15 AM	Recipe started at 7:41 AM
3/23/2010	7:41:15 AM	H2 valve closed
3/23/2010	7:41:15 AM	BCl3 valve closed
3/23/2010	7:41:15 AM	PH3 valve closed
3/23/2010	7:41:15 AM	SiCl4 pre valve closed
3/23/2010	7:41:15 AM	SiCl4 post valve closed
3/23/2010	7:41:15 AM	Main Vac valve closed
3/23/2010	7:41:15 AM	Bypass valve closed
3/23/2010	7:41:15 AM	Bubbler valve closed
3/23/2010	7:41:15 AM	Helium valve opened
3/23/2010	7:41:15 AM	Helium MFC set to  500.000000
3/23/2010	7:41:15 AM	H2 MFC set to  0.000000
3/23/2010	7:41:15 AM	BCl3 MFC set to  0.000000
3/23/2010	7:41:15 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:41:15 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:41:15 AM	Tube furnace set to 0
3/23/2010	7:41:17 AM	Helium valve closed
3/23/2010	7:41:17 AM	H2 valve closed
3/23/2010	7:41:17 AM	BCl3 valve closed
3/23/2010	7:41:17 AM	PH3 valve closed
3/23/2010	7:41:17 AM	SiCl4 pre valve closed
3/23/2010	7:41:17 AM	SiCl4 post valve closed
3/23/2010	7:41:17 AM	Main Vac valve closed
3/23/2010	7:41:17 AM	Bypass valve closed
3/23/2010	7:41:17 AM	Bubbler valve closed
3/23/2010	7:41:17 AM	Helium MFC set to  0.000000
3/23/2010	7:41:17 AM	H2 MFC set to  0.000000
3/23/2010	7:41:17 AM	BCl3 MFC set to  0.000000
3/23/2010	7:41:17 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:41:17 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:41:17 AM	Tube furnace set to 0
3/23/2010	7:41:33 AM	Helium valve closed
3/23/2010	7:41:33 AM	H2 valve closed
3/23/2010	7:41:33 AM	BCl3 valve closed
3/23/2010	7:41:33 AM	PH3 valve closed
3/23/2010	7:41:33 AM	SiCl4 pre valve closed
3/23/2010	7:41:33 AM	SiCl4 post valve closed
3/23/2010	7:41:33 AM	Main Vac valve closed
3/23/2010	7:41:33 AM	Bubbler valve closed
3/23/2010	7:41:33 AM	Bypass valve opened
3/23/2010	7:41:33 AM	Helium MFC set to  0.000000
3/23/2010	7:41:33 AM	H2 MFC set to  0.000000
3/23/2010	7:41:33 AM	BCl3 MFC set to  0.000000
3/23/2010	7:41:33 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:41:33 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:41:33 AM	Tube furnace set to 0
3/23/2010	7:41:56 AM	Helium valve closed
3/23/2010	7:41:56 AM	H2 valve closed
3/23/2010	7:41:56 AM	BCl3 valve closed
3/23/2010	7:41:56 AM	PH3 valve closed
3/23/2010	7:41:56 AM	SiCl4 pre valve closed
3/23/2010	7:41:56 AM	SiCl4 post valve closed
3/23/2010	7:41:56 AM	Bubbler valve closed
3/23/2010	7:41:56 AM	Main Vac valve opened
3/23/2010	7:41:56 AM	Bypass valve opened
3/23/2010	7:41:56 AM	Helium MFC set to  0.000000
3/23/2010	7:41:56 AM	H2 MFC set to  0.000000
3/23/2010	7:41:56 AM	BCl3 MFC set to  0.000000
3/23/2010	7:41:56 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:41:56 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:41:56 AM	Tube furnace set to 0
3/23/2010	7:46:56 AM	H2 valve closed
3/23/2010	7:46:56 AM	BCl3 valve closed
3/23/2010	7:46:56 AM	PH3 valve closed
3/23/2010	7:46:56 AM	SiCl4 pre valve closed
3/23/2010	7:46:56 AM	SiCl4 post valve closed
3/23/2010	7:46:56 AM	Main Vac valve closed
3/23/2010	7:46:56 AM	Bypass valve closed
3/23/2010	7:46:56 AM	Bubbler valve closed
3/23/2010	7:46:56 AM	Helium valve opened
3/23/2010	7:46:56 AM	Helium MFC set to  500.000000
3/23/2010	7:46:56 AM	H2 MFC set to  0.000000
3/23/2010	7:46:56 AM	BCl3 MFC set to  0.000000
3/23/2010	7:46:56 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:46:56 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:46:56 AM	Tube furnace set to 0
3/23/2010	7:48:18 AM	Helium valve closed
3/23/2010	7:48:18 AM	H2 valve closed
3/23/2010	7:48:18 AM	BCl3 valve closed
3/23/2010	7:48:18 AM	PH3 valve closed
3/23/2010	7:48:18 AM	SiCl4 pre valve closed
3/23/2010	7:48:18 AM	SiCl4 post valve closed
3/23/2010	7:48:18 AM	Main Vac valve closed
3/23/2010	7:48:18 AM	Bypass valve closed
3/23/2010	7:48:18 AM	Bubbler valve closed
3/23/2010	7:48:18 AM	Helium MFC set to  0.000000
3/23/2010	7:48:18 AM	H2 MFC set to  0.000000
3/23/2010	7:48:18 AM	BCl3 MFC set to  0.000000
3/23/2010	7:48:18 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:48:18 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:48:18 AM	Tube furnace set to 0
3/23/2010	7:48:33 AM	Helium valve closed
3/23/2010	7:48:33 AM	H2 valve closed
3/23/2010	7:48:33 AM	BCl3 valve closed
3/23/2010	7:48:33 AM	PH3 valve closed
3/23/2010	7:48:33 AM	SiCl4 pre valve closed
3/23/2010	7:48:33 AM	SiCl4 post valve closed
3/23/2010	7:48:33 AM	Main Vac valve closed
3/23/2010	7:48:33 AM	Bubbler valve closed
3/23/2010	7:48:33 AM	Bypass valve opened
3/23/2010	7:48:33 AM	Helium MFC set to  0.000000
3/23/2010	7:48:33 AM	H2 MFC set to  0.000000
3/23/2010	7:48:33 AM	BCl3 MFC set to  0.000000
3/23/2010	7:48:33 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:48:33 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:48:33 AM	Tube furnace set to 0
3/23/2010	7:48:56 AM	Helium valve closed
3/23/2010	7:48:56 AM	H2 valve closed
3/23/2010	7:48:56 AM	BCl3 valve closed
3/23/2010	7:48:56 AM	PH3 valve closed
3/23/2010	7:48:56 AM	SiCl4 pre valve closed
3/23/2010	7:48:56 AM	SiCl4 post valve closed
3/23/2010	7:48:56 AM	Bubbler valve closed
3/23/2010	7:48:56 AM	Main Vac valve opened
3/23/2010	7:48:56 AM	Bypass valve opened
3/23/2010	7:48:56 AM	Helium MFC set to  0.000000
3/23/2010	7:48:56 AM	H2 MFC set to  0.000000
3/23/2010	7:48:56 AM	BCl3 MFC set to  0.000000
3/23/2010	7:48:56 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:48:56 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:48:56 AM	Tube furnace set to 0
3/23/2010	7:53:56 AM	H2 valve closed
3/23/2010	7:53:57 AM	BCl3 valve closed
3/23/2010	7:53:57 AM	PH3 valve closed
3/23/2010	7:53:57 AM	SiCl4 pre valve closed
3/23/2010	7:53:57 AM	SiCl4 post valve closed
3/23/2010	7:53:57 AM	Main Vac valve closed
3/23/2010	7:53:57 AM	Bypass valve closed
3/23/2010	7:53:57 AM	Bubbler valve closed
3/23/2010	7:53:57 AM	Helium valve opened
3/23/2010	7:53:57 AM	Helium MFC set to  500.000000
3/23/2010	7:53:57 AM	H2 MFC set to  0.000000
3/23/2010	7:53:57 AM	BCl3 MFC set to  0.000000
3/23/2010	7:53:57 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:53:57 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:53:57 AM	Tube furnace set to 0
3/23/2010	7:55:19 AM	Helium valve closed
3/23/2010	7:55:19 AM	H2 valve closed
3/23/2010	7:55:19 AM	BCl3 valve closed
3/23/2010	7:55:19 AM	PH3 valve closed
3/23/2010	7:55:19 AM	SiCl4 pre valve closed
3/23/2010	7:55:19 AM	SiCl4 post valve closed
3/23/2010	7:55:19 AM	Main Vac valve closed
3/23/2010	7:55:19 AM	Bypass valve closed
3/23/2010	7:55:19 AM	Bubbler valve closed
3/23/2010	7:55:19 AM	Helium MFC set to  0.000000
3/23/2010	7:55:19 AM	H2 MFC set to  0.000000
3/23/2010	7:55:19 AM	BCl3 MFC set to  0.000000
3/23/2010	7:55:19 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:55:19 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:55:19 AM	Tube furnace set to 0
3/23/2010	7:55:34 AM	Helium valve closed
3/23/2010	7:55:34 AM	H2 valve closed
3/23/2010	7:55:34 AM	BCl3 valve closed
3/23/2010	7:55:34 AM	PH3 valve closed
3/23/2010	7:55:34 AM	SiCl4 pre valve closed
3/23/2010	7:55:34 AM	SiCl4 post valve closed
3/23/2010	7:55:34 AM	Main Vac valve closed
3/23/2010	7:55:34 AM	Bubbler valve closed
3/23/2010	7:55:34 AM	Bypass valve opened
3/23/2010	7:55:34 AM	Helium MFC set to  0.000000
3/23/2010	7:55:34 AM	H2 MFC set to  0.000000
3/23/2010	7:55:34 AM	BCl3 MFC set to  0.000000
3/23/2010	7:55:34 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:55:34 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:55:34 AM	Tube furnace set to 0
3/23/2010	7:55:57 AM	Helium valve closed
3/23/2010	7:55:57 AM	H2 valve closed
3/23/2010	7:55:57 AM	BCl3 valve closed
3/23/2010	7:55:57 AM	PH3 valve closed
3/23/2010	7:55:57 AM	SiCl4 pre valve closed
3/23/2010	7:55:57 AM	SiCl4 post valve closed
3/23/2010	7:55:57 AM	Bubbler valve closed
3/23/2010	7:55:57 AM	Main Vac valve opened
3/23/2010	7:55:57 AM	Bypass valve opened
3/23/2010	7:55:57 AM	Helium MFC set to  0.000000
3/23/2010	7:55:57 AM	H2 MFC set to  0.000000
3/23/2010	7:55:57 AM	BCl3 MFC set to  0.000000
3/23/2010	7:55:57 AM	SiCl4 MFC set to  0.000000
3/23/2010	7:55:57 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	7:55:57 AM	Tube furnace set to 0
3/23/2010	8:00:57 AM	Helium valve closed
3/23/2010	8:00:57 AM	H2 valve closed
3/23/2010	8:00:57 AM	BCl3 valve closed
3/23/2010	8:00:57 AM	PH3 valve closed
3/23/2010	8:00:57 AM	SiCl4 pre valve closed
3/23/2010	8:00:57 AM	SiCl4 post valve closed
3/23/2010	8:00:57 AM	Bubbler valve closed
3/23/2010	8:00:57 AM	Main Vac valve opened
3/23/2010	8:00:57 AM	Bypass valve opened
3/23/2010	8:00:57 AM	Helium MFC set to  0.000000
3/23/2010	8:00:57 AM	H2 MFC set to  0.000000
3/23/2010	8:00:57 AM	BCl3 MFC set to  0.000000
3/23/2010	8:00:57 AM	SiCl4 MFC set to  0.000000
3/23/2010	8:00:57 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	8:00:57 AM	Tube furnace set to 0
3/23/2010	8:00:58 AM	Run finished at 8:00 AM
3/23/2010	8:00:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/23/2010	9:30:53 AM	Recipe started at 9:30 AM
3/23/2010	9:30:53 AM	Helium valve closed
3/23/2010	9:30:53 AM	BCl3 valve closed
3/23/2010	9:30:53 AM	PH3 valve closed
3/23/2010	9:30:53 AM	SiCl4 pre valve closed
3/23/2010	9:30:53 AM	SiCl4 post valve closed
3/23/2010	9:30:53 AM	Main Vac valve closed
3/23/2010	9:30:53 AM	Bypass valve closed
3/23/2010	9:30:53 AM	Bubbler valve closed
3/23/2010	9:30:53 AM	H2 valve opened
3/23/2010	9:30:53 AM	Helium MFC set to  0.000000
3/23/2010	9:30:53 AM	H2 MFC set to  500.000000
3/23/2010	9:30:53 AM	BCl3 MFC set to  0.000000
3/23/2010	9:30:53 AM	SiCl4 MFC set to  0.000000
3/23/2010	9:30:53 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	9:30:53 AM	Tube furnace set to 0
3/23/2010	9:32:13 AM	Helium valve closed
3/23/2010	9:32:13 AM	BCl3 valve closed
3/23/2010	9:32:13 AM	PH3 valve closed
3/23/2010	9:32:13 AM	SiCl4 pre valve closed
3/23/2010	9:32:13 AM	SiCl4 post valve closed
3/23/2010	9:32:13 AM	Main Vac valve closed
3/23/2010	9:32:13 AM	Bypass valve closed
3/23/2010	9:32:13 AM	H2 valve opened
3/23/2010	9:32:13 AM	Bubbler valve opened
3/23/2010	9:32:13 AM	Helium MFC set to  0.000000
3/23/2010	9:32:13 AM	H2 MFC set to  500.000000
3/23/2010	9:32:13 AM	BCl3 MFC set to  0.000000
3/23/2010	9:32:13 AM	SiCl4 MFC set to  0.000000
3/23/2010	9:32:13 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	9:32:13 AM	Tube furnace set to 0
3/23/2010	9:52:13 AM	Helium valve closed
3/23/2010	9:52:13 AM	BCl3 valve closed
3/23/2010	9:52:13 AM	PH3 valve closed
3/23/2010	9:52:13 AM	Main Vac valve closed
3/23/2010	9:52:13 AM	Bypass valve closed
3/23/2010	9:52:13 AM	H2 valve opened
3/23/2010	9:52:13 AM	SiCl4 pre valve opened
3/23/2010	9:52:13 AM	SiCl4 post valve opened
3/23/2010	9:52:13 AM	Bubbler valve opened
3/23/2010	9:52:13 AM	Helium MFC set to  0.000000
3/23/2010	9:52:13 AM	H2 MFC set to  500.000000
3/23/2010	9:52:13 AM	BCl3 MFC set to  0.000000
3/23/2010	9:52:13 AM	SiCl4 MFC set to  325.000000
3/23/2010	9:52:13 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	9:52:13 AM	Tube furnace set to 0
3/23/2010	10:07:14 AM	Helium valve closed
3/23/2010	10:07:14 AM	BCl3 valve closed
3/23/2010	10:07:14 AM	PH3 valve closed
3/23/2010	10:07:14 AM	SiCl4 pre valve closed
3/23/2010	10:07:14 AM	SiCl4 post valve closed
3/23/2010	10:07:14 AM	Main Vac valve closed
3/23/2010	10:07:14 AM	Bypass valve closed
3/23/2010	10:07:14 AM	H2 valve opened
3/23/2010	10:07:14 AM	Bubbler valve opened
3/23/2010	10:07:14 AM	Helium MFC set to  0.000000
3/23/2010	10:07:14 AM	H2 MFC set to  500.000000
3/23/2010	10:07:14 AM	BCl3 MFC set to  0.000000
3/23/2010	10:07:14 AM	SiCl4 MFC set to  0.000000
3/23/2010	10:07:14 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	10:07:14 AM	Tube furnace set to 0
3/23/2010	10:27:14 AM	H2 valve closed
3/23/2010	10:27:14 AM	BCl3 valve closed
3/23/2010	10:27:14 AM	PH3 valve closed
3/23/2010	10:27:14 AM	SiCl4 pre valve closed
3/23/2010	10:27:14 AM	SiCl4 post valve closed
3/23/2010	10:27:14 AM	Main Vac valve closed
3/23/2010	10:27:14 AM	Bypass valve closed
3/23/2010	10:27:14 AM	Helium valve opened
3/23/2010	10:27:14 AM	Bubbler valve opened
3/23/2010	10:27:14 AM	Helium MFC set to  500.000000
3/23/2010	10:27:14 AM	H2 MFC set to  0.000000
3/23/2010	10:27:14 AM	BCl3 MFC set to  0.000000
3/23/2010	10:27:14 AM	SiCl4 MFC set to  0.000000
3/23/2010	10:27:14 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	10:27:14 AM	Tube furnace set to 0
3/23/2010	10:47:15 AM	Helium valve closed
3/23/2010	10:47:15 AM	H2 valve closed
3/23/2010	10:47:15 AM	BCl3 valve closed
3/23/2010	10:47:15 AM	PH3 valve closed
3/23/2010	10:47:15 AM	SiCl4 pre valve closed
3/23/2010	10:47:15 AM	SiCl4 post valve closed
3/23/2010	10:47:15 AM	Main Vac valve closed
3/23/2010	10:47:15 AM	Bypass valve closed
3/23/2010	10:47:15 AM	Bubbler valve closed
3/23/2010	10:47:15 AM	Helium MFC set to  0.000000
3/23/2010	10:47:15 AM	H2 MFC set to  0.000000
3/23/2010	10:47:15 AM	BCl3 MFC set to  0.000000
3/23/2010	10:47:15 AM	SiCl4 MFC set to  0.000000
3/23/2010	10:47:15 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	10:47:15 AM	Tube furnace set to 0
3/23/2010	10:47:15 AM	Run finished at 10:47 AM
3/23/2010	11:08:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	11:08:31 AM	Recipe started at 11:08 AM
3/23/2010	11:08:31 AM	Helium valve closed
3/23/2010	11:08:31 AM	H2 valve closed
3/23/2010	11:08:31 AM	BCl3 valve closed
3/23/2010	11:08:31 AM	PH3 valve closed
3/23/2010	11:08:31 AM	SiCl4 pre valve closed
3/23/2010	11:08:31 AM	SiCl4 post valve closed
3/23/2010	11:08:31 AM	Main Vac valve closed
3/23/2010	11:08:31 AM	Bubbler valve closed
3/23/2010	11:08:31 AM	Bypass valve opened
3/23/2010	11:08:31 AM	Helium MFC set to  0.000000
3/23/2010	11:08:31 AM	H2 MFC set to  0.000000
3/23/2010	11:08:31 AM	BCl3 MFC set to  0.000000
3/23/2010	11:08:31 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:08:31 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:08:31 AM	Tube furnace set to 0
3/23/2010	11:09:05 AM	Helium valve closed
3/23/2010	11:09:05 AM	H2 valve closed
3/23/2010	11:09:05 AM	BCl3 valve closed
3/23/2010	11:09:05 AM	PH3 valve closed
3/23/2010	11:09:05 AM	SiCl4 pre valve closed
3/23/2010	11:09:05 AM	SiCl4 post valve closed
3/23/2010	11:09:05 AM	Bubbler valve closed
3/23/2010	11:09:05 AM	Main Vac valve opened
3/23/2010	11:09:05 AM	Bypass valve opened
3/23/2010	11:09:05 AM	Helium MFC set to  0.000000
3/23/2010	11:09:05 AM	H2 MFC set to  0.000000
3/23/2010	11:09:05 AM	BCl3 MFC set to  0.000000
3/23/2010	11:09:05 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:09:05 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:09:05 AM	Tube furnace set to 0
3/23/2010	11:09:06 AM	Run finished at 11:09 AM
3/23/2010	11:09:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	11:09:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/23/2010	11:09:58 AM	Recipe started at 11:09 AM
3/23/2010	11:09:58 AM	H2 valve closed
3/23/2010	11:09:58 AM	BCl3 valve closed
3/23/2010	11:09:58 AM	PH3 valve closed
3/23/2010	11:09:58 AM	SiCl4 pre valve closed
3/23/2010	11:09:58 AM	SiCl4 post valve closed
3/23/2010	11:09:58 AM	Main Vac valve closed
3/23/2010	11:09:58 AM	Bypass valve closed
3/23/2010	11:09:58 AM	Bubbler valve closed
3/23/2010	11:09:58 AM	Helium valve opened
3/23/2010	11:09:58 AM	Helium MFC set to  500.000000
3/23/2010	11:09:58 AM	H2 MFC set to  0.000000
3/23/2010	11:09:58 AM	BCl3 MFC set to  0.000000
3/23/2010	11:09:58 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:09:58 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:09:58 AM	Tube furnace set to 0
3/23/2010	11:11:20 AM	Helium valve closed
3/23/2010	11:11:20 AM	H2 valve closed
3/23/2010	11:11:20 AM	BCl3 valve closed
3/23/2010	11:11:20 AM	PH3 valve closed
3/23/2010	11:11:20 AM	SiCl4 pre valve closed
3/23/2010	11:11:20 AM	SiCl4 post valve closed
3/23/2010	11:11:20 AM	Main Vac valve closed
3/23/2010	11:11:20 AM	Bypass valve closed
3/23/2010	11:11:20 AM	Bubbler valve closed
3/23/2010	11:11:20 AM	Helium MFC set to  0.000000
3/23/2010	11:11:20 AM	H2 MFC set to  0.000000
3/23/2010	11:11:20 AM	BCl3 MFC set to  0.000000
3/23/2010	11:11:20 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:11:20 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:11:20 AM	Tube furnace set to 0
3/23/2010	11:11:35 AM	Helium valve closed
3/23/2010	11:11:35 AM	H2 valve closed
3/23/2010	11:11:35 AM	BCl3 valve closed
3/23/2010	11:11:35 AM	PH3 valve closed
3/23/2010	11:11:35 AM	SiCl4 pre valve closed
3/23/2010	11:11:35 AM	SiCl4 post valve closed
3/23/2010	11:11:35 AM	Main Vac valve closed
3/23/2010	11:11:35 AM	Bubbler valve closed
3/23/2010	11:11:35 AM	Bypass valve opened
3/23/2010	11:11:35 AM	Helium MFC set to  0.000000
3/23/2010	11:11:35 AM	H2 MFC set to  0.000000
3/23/2010	11:11:35 AM	BCl3 MFC set to  0.000000
3/23/2010	11:11:35 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:11:35 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:11:35 AM	Tube furnace set to 0
3/23/2010	11:11:59 AM	Helium valve closed
3/23/2010	11:11:59 AM	H2 valve closed
3/23/2010	11:11:59 AM	BCl3 valve closed
3/23/2010	11:11:59 AM	PH3 valve closed
3/23/2010	11:11:59 AM	SiCl4 pre valve closed
3/23/2010	11:11:59 AM	SiCl4 post valve closed
3/23/2010	11:11:59 AM	Bubbler valve closed
3/23/2010	11:11:59 AM	Main Vac valve opened
3/23/2010	11:11:59 AM	Bypass valve opened
3/23/2010	11:11:59 AM	Helium MFC set to  0.000000
3/23/2010	11:11:59 AM	H2 MFC set to  0.000000
3/23/2010	11:11:59 AM	BCl3 MFC set to  0.000000
3/23/2010	11:11:59 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:11:59 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:11:59 AM	Tube furnace set to 0
3/23/2010	11:16:59 AM	H2 valve closed
3/23/2010	11:16:59 AM	BCl3 valve closed
3/23/2010	11:16:59 AM	PH3 valve closed
3/23/2010	11:16:59 AM	SiCl4 pre valve closed
3/23/2010	11:16:59 AM	SiCl4 post valve closed
3/23/2010	11:16:59 AM	Main Vac valve closed
3/23/2010	11:16:59 AM	Bypass valve closed
3/23/2010	11:16:59 AM	Bubbler valve closed
3/23/2010	11:16:59 AM	Helium valve opened
3/23/2010	11:16:59 AM	Helium MFC set to  500.000000
3/23/2010	11:16:59 AM	H2 MFC set to  0.000000
3/23/2010	11:16:59 AM	BCl3 MFC set to  0.000000
3/23/2010	11:16:59 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:16:59 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:16:59 AM	Tube furnace set to 0
3/23/2010	11:18:21 AM	Helium valve closed
3/23/2010	11:18:21 AM	H2 valve closed
3/23/2010	11:18:21 AM	BCl3 valve closed
3/23/2010	11:18:21 AM	PH3 valve closed
3/23/2010	11:18:21 AM	SiCl4 pre valve closed
3/23/2010	11:18:21 AM	SiCl4 post valve closed
3/23/2010	11:18:21 AM	Main Vac valve closed
3/23/2010	11:18:21 AM	Bypass valve closed
3/23/2010	11:18:21 AM	Bubbler valve closed
3/23/2010	11:18:21 AM	Helium MFC set to  0.000000
3/23/2010	11:18:21 AM	H2 MFC set to  0.000000
3/23/2010	11:18:21 AM	BCl3 MFC set to  0.000000
3/23/2010	11:18:21 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:18:21 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:18:21 AM	Tube furnace set to 0
3/23/2010	11:18:36 AM	Helium valve closed
3/23/2010	11:18:36 AM	H2 valve closed
3/23/2010	11:18:36 AM	BCl3 valve closed
3/23/2010	11:18:36 AM	PH3 valve closed
3/23/2010	11:18:36 AM	SiCl4 pre valve closed
3/23/2010	11:18:36 AM	SiCl4 post valve closed
3/23/2010	11:18:36 AM	Main Vac valve closed
3/23/2010	11:18:36 AM	Bubbler valve closed
3/23/2010	11:18:36 AM	Bypass valve opened
3/23/2010	11:18:36 AM	Helium MFC set to  0.000000
3/23/2010	11:18:36 AM	H2 MFC set to  0.000000
3/23/2010	11:18:36 AM	BCl3 MFC set to  0.000000
3/23/2010	11:18:36 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:18:36 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:18:36 AM	Tube furnace set to 0
3/23/2010	11:19:00 AM	Helium valve closed
3/23/2010	11:19:00 AM	H2 valve closed
3/23/2010	11:19:00 AM	BCl3 valve closed
3/23/2010	11:19:00 AM	PH3 valve closed
3/23/2010	11:19:00 AM	SiCl4 pre valve closed
3/23/2010	11:19:00 AM	SiCl4 post valve closed
3/23/2010	11:19:00 AM	Bubbler valve closed
3/23/2010	11:19:00 AM	Main Vac valve opened
3/23/2010	11:19:00 AM	Bypass valve opened
3/23/2010	11:19:00 AM	Helium MFC set to  0.000000
3/23/2010	11:19:00 AM	H2 MFC set to  0.000000
3/23/2010	11:19:00 AM	BCl3 MFC set to  0.000000
3/23/2010	11:19:00 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:19:00 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:19:00 AM	Tube furnace set to 0
3/23/2010	11:24:00 AM	H2 valve closed
3/23/2010	11:24:00 AM	BCl3 valve closed
3/23/2010	11:24:00 AM	PH3 valve closed
3/23/2010	11:24:00 AM	SiCl4 pre valve closed
3/23/2010	11:24:00 AM	SiCl4 post valve closed
3/23/2010	11:24:00 AM	Main Vac valve closed
3/23/2010	11:24:00 AM	Bypass valve closed
3/23/2010	11:24:00 AM	Bubbler valve closed
3/23/2010	11:24:00 AM	Helium valve opened
3/23/2010	11:24:00 AM	Helium MFC set to  500.000000
3/23/2010	11:24:00 AM	H2 MFC set to  0.000000
3/23/2010	11:24:00 AM	BCl3 MFC set to  0.000000
3/23/2010	11:24:00 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:24:00 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:24:00 AM	Tube furnace set to 0
3/23/2010	11:25:22 AM	Helium valve closed
3/23/2010	11:25:22 AM	H2 valve closed
3/23/2010	11:25:22 AM	BCl3 valve closed
3/23/2010	11:25:22 AM	PH3 valve closed
3/23/2010	11:25:22 AM	SiCl4 pre valve closed
3/23/2010	11:25:22 AM	SiCl4 post valve closed
3/23/2010	11:25:22 AM	Main Vac valve closed
3/23/2010	11:25:22 AM	Bypass valve closed
3/23/2010	11:25:22 AM	Bubbler valve closed
3/23/2010	11:25:22 AM	Helium MFC set to  0.000000
3/23/2010	11:25:22 AM	H2 MFC set to  0.000000
3/23/2010	11:25:22 AM	BCl3 MFC set to  0.000000
3/23/2010	11:25:22 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:25:22 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:25:22 AM	Tube furnace set to 0
3/23/2010	11:25:37 AM	Helium valve closed
3/23/2010	11:25:37 AM	H2 valve closed
3/23/2010	11:25:37 AM	BCl3 valve closed
3/23/2010	11:25:37 AM	PH3 valve closed
3/23/2010	11:25:37 AM	SiCl4 pre valve closed
3/23/2010	11:25:37 AM	SiCl4 post valve closed
3/23/2010	11:25:37 AM	Main Vac valve closed
3/23/2010	11:25:37 AM	Bubbler valve closed
3/23/2010	11:25:37 AM	Bypass valve opened
3/23/2010	11:25:37 AM	Helium MFC set to  0.000000
3/23/2010	11:25:37 AM	H2 MFC set to  0.000000
3/23/2010	11:25:37 AM	BCl3 MFC set to  0.000000
3/23/2010	11:25:37 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:25:37 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:25:37 AM	Tube furnace set to 0
3/23/2010	11:26:01 AM	Helium valve closed
3/23/2010	11:26:01 AM	H2 valve closed
3/23/2010	11:26:01 AM	BCl3 valve closed
3/23/2010	11:26:01 AM	PH3 valve closed
3/23/2010	11:26:01 AM	SiCl4 pre valve closed
3/23/2010	11:26:01 AM	SiCl4 post valve closed
3/23/2010	11:26:01 AM	Bubbler valve closed
3/23/2010	11:26:01 AM	Main Vac valve opened
3/23/2010	11:26:01 AM	Bypass valve opened
3/23/2010	11:26:01 AM	Helium MFC set to  0.000000
3/23/2010	11:26:01 AM	H2 MFC set to  0.000000
3/23/2010	11:26:01 AM	BCl3 MFC set to  0.000000
3/23/2010	11:26:01 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:26:01 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:26:01 AM	Tube furnace set to 0
3/23/2010	11:31:01 AM	Helium valve closed
3/23/2010	11:31:01 AM	H2 valve closed
3/23/2010	11:31:01 AM	BCl3 valve closed
3/23/2010	11:31:01 AM	PH3 valve closed
3/23/2010	11:31:01 AM	SiCl4 pre valve closed
3/23/2010	11:31:01 AM	SiCl4 post valve closed
3/23/2010	11:31:01 AM	Bubbler valve closed
3/23/2010	11:31:01 AM	Main Vac valve opened
3/23/2010	11:31:01 AM	Bypass valve opened
3/23/2010	11:31:01 AM	Helium MFC set to  0.000000
3/23/2010	11:31:01 AM	H2 MFC set to  0.000000
3/23/2010	11:31:01 AM	BCl3 MFC set to  0.000000
3/23/2010	11:31:01 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:31:01 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:31:01 AM	Tube furnace set to 0
3/23/2010	11:31:03 AM	Run finished at 11:31 AM
3/23/2010	11:31:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/23/2010	11:31:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	11:31:19 AM	Recipe started at 11:31 AM
3/23/2010	11:31:19 AM	H2 valve closed
3/23/2010	11:31:19 AM	BCl3 valve closed
3/23/2010	11:31:19 AM	PH3 valve closed
3/23/2010	11:31:19 AM	SiCl4 pre valve closed
3/23/2010	11:31:19 AM	SiCl4 post valve closed
3/23/2010	11:31:19 AM	Main Vac valve closed
3/23/2010	11:31:19 AM	Bypass valve closed
3/23/2010	11:31:19 AM	Bubbler valve closed
3/23/2010	11:31:19 AM	Helium valve opened
3/23/2010	11:31:19 AM	Helium MFC set to  500.000000
3/23/2010	11:31:19 AM	H2 MFC set to  0.000000
3/23/2010	11:31:19 AM	BCl3 MFC set to  0.000000
3/23/2010	11:31:19 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:31:19 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:31:19 AM	Tube furnace set to 0
3/23/2010	11:32:39 AM	Helium valve closed
3/23/2010	11:32:39 AM	H2 valve closed
3/23/2010	11:32:39 AM	BCl3 valve closed
3/23/2010	11:32:39 AM	PH3 valve closed
3/23/2010	11:32:39 AM	SiCl4 pre valve closed
3/23/2010	11:32:39 AM	SiCl4 post valve closed
3/23/2010	11:32:39 AM	Main Vac valve closed
3/23/2010	11:32:39 AM	Bypass valve closed
3/23/2010	11:32:39 AM	Bubbler valve closed
3/23/2010	11:32:39 AM	Helium MFC set to  0.000000
3/23/2010	11:32:39 AM	H2 MFC set to  0.000000
3/23/2010	11:32:39 AM	BCl3 MFC set to  0.000000
3/23/2010	11:32:39 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:32:39 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:32:39 AM	Tube furnace set to 0
3/23/2010	11:32:39 AM	Run finished at 11:32 AM
3/23/2010	11:32:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	11:32:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	11:32:43 AM	Recipe started at 11:32 AM
3/23/2010	11:32:43 AM	Helium valve closed
3/23/2010	11:32:43 AM	H2 valve closed
3/23/2010	11:32:43 AM	BCl3 valve closed
3/23/2010	11:32:43 AM	PH3 valve closed
3/23/2010	11:32:43 AM	SiCl4 pre valve closed
3/23/2010	11:32:43 AM	SiCl4 post valve closed
3/23/2010	11:32:43 AM	Main Vac valve closed
3/23/2010	11:32:43 AM	Bubbler valve closed
3/23/2010	11:32:43 AM	Bypass valve opened
3/23/2010	11:32:43 AM	Helium MFC set to  0.000000
3/23/2010	11:32:43 AM	H2 MFC set to  0.000000
3/23/2010	11:32:43 AM	BCl3 MFC set to  0.000000
3/23/2010	11:32:43 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:32:43 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:32:43 AM	Tube furnace set to 0
3/23/2010	11:33:06 AM	Helium valve closed
3/23/2010	11:33:06 AM	H2 valve closed
3/23/2010	11:33:06 AM	BCl3 valve closed
3/23/2010	11:33:06 AM	PH3 valve closed
3/23/2010	11:33:06 AM	SiCl4 pre valve closed
3/23/2010	11:33:06 AM	SiCl4 post valve closed
3/23/2010	11:33:06 AM	Bubbler valve closed
3/23/2010	11:33:06 AM	Main Vac valve opened
3/23/2010	11:33:06 AM	Bypass valve opened
3/23/2010	11:33:07 AM	Helium MFC set to  0.000000
3/23/2010	11:33:07 AM	H2 MFC set to  0.000000
3/23/2010	11:33:07 AM	BCl3 MFC set to  0.000000
3/23/2010	11:33:07 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:33:07 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:33:07 AM	Tube furnace set to 0
3/23/2010	11:33:07 AM	Run finished at 11:33 AM
3/23/2010	11:33:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	11:34:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	11:35:00 AM	Recipe started at 11:35 AM
3/23/2010	11:35:00 AM	H2 valve closed
3/23/2010	11:35:00 AM	BCl3 valve closed
3/23/2010	11:35:00 AM	PH3 valve closed
3/23/2010	11:35:00 AM	SiCl4 pre valve closed
3/23/2010	11:35:00 AM	SiCl4 post valve closed
3/23/2010	11:35:00 AM	Main Vac valve closed
3/23/2010	11:35:00 AM	Bypass valve closed
3/23/2010	11:35:00 AM	Bubbler valve closed
3/23/2010	11:35:00 AM	Helium valve opened
3/23/2010	11:35:00 AM	Helium MFC set to  500.000000
3/23/2010	11:35:00 AM	H2 MFC set to  0.000000
3/23/2010	11:35:00 AM	BCl3 MFC set to  0.000000
3/23/2010	11:35:00 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:35:00 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:35:00 AM	Tube furnace set to 0
3/23/2010	11:36:20 AM	Helium valve closed
3/23/2010	11:36:20 AM	H2 valve closed
3/23/2010	11:36:20 AM	BCl3 valve closed
3/23/2010	11:36:20 AM	PH3 valve closed
3/23/2010	11:36:20 AM	SiCl4 pre valve closed
3/23/2010	11:36:20 AM	SiCl4 post valve closed
3/23/2010	11:36:20 AM	Main Vac valve closed
3/23/2010	11:36:20 AM	Bypass valve closed
3/23/2010	11:36:20 AM	Bubbler valve closed
3/23/2010	11:36:20 AM	Helium MFC set to  0.000000
3/23/2010	11:36:20 AM	H2 MFC set to  0.000000
3/23/2010	11:36:20 AM	BCl3 MFC set to  0.000000
3/23/2010	11:36:20 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:36:20 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:36:20 AM	Tube furnace set to 0
3/23/2010	11:36:20 AM	Run finished at 11:36 AM
3/23/2010	11:36:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/23/2010	11:36:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	11:36:30 AM	Recipe started at 11:36 AM
3/23/2010	11:36:30 AM	Helium valve closed
3/23/2010	11:36:30 AM	H2 valve closed
3/23/2010	11:36:30 AM	BCl3 valve closed
3/23/2010	11:36:30 AM	PH3 valve closed
3/23/2010	11:36:30 AM	SiCl4 pre valve closed
3/23/2010	11:36:30 AM	SiCl4 post valve closed
3/23/2010	11:36:30 AM	Main Vac valve closed
3/23/2010	11:36:30 AM	Bubbler valve closed
3/23/2010	11:36:30 AM	Bypass valve opened
3/23/2010	11:36:30 AM	Helium MFC set to  0.000000
3/23/2010	11:36:30 AM	H2 MFC set to  0.000000
3/23/2010	11:36:30 AM	BCl3 MFC set to  0.000000
3/23/2010	11:36:30 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:36:30 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:36:30 AM	Tube furnace set to 0
3/23/2010	11:36:53 AM	Helium valve closed
3/23/2010	11:36:53 AM	H2 valve closed
3/23/2010	11:36:53 AM	BCl3 valve closed
3/23/2010	11:36:53 AM	PH3 valve closed
3/23/2010	11:36:53 AM	SiCl4 pre valve closed
3/23/2010	11:36:53 AM	SiCl4 post valve closed
3/23/2010	11:36:53 AM	Bubbler valve closed
3/23/2010	11:36:53 AM	Main Vac valve opened
3/23/2010	11:36:53 AM	Bypass valve opened
3/23/2010	11:36:53 AM	Helium MFC set to  0.000000
3/23/2010	11:36:53 AM	H2 MFC set to  0.000000
3/23/2010	11:36:53 AM	BCl3 MFC set to  0.000000
3/23/2010	11:36:53 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:36:53 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:36:53 AM	Tube furnace set to 0
3/23/2010	11:36:53 AM	Run finished at 11:36 AM
3/23/2010	11:36:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	11:38:31 AM	Bypass valve closed
3/23/2010	11:38:32 AM	Main Vac valve closed
3/23/2010	11:38:42 AM	Main Vac valve opened
3/23/2010	11:38:43 AM	Bypass valve opened
3/23/2010	11:38:49 AM	Recipe started at 11:38 AM
3/23/2010	11:38:49 AM	Helium valve closed
3/23/2010	11:38:49 AM	BCl3 valve closed
3/23/2010	11:38:49 AM	PH3 valve closed
3/23/2010	11:38:49 AM	SiCl4 pre valve closed
3/23/2010	11:38:49 AM	SiCl4 post valve closed
3/23/2010	11:38:49 AM	Main Vac valve closed
3/23/2010	11:38:49 AM	Bypass valve closed
3/23/2010	11:38:49 AM	Bubbler valve closed
3/23/2010	11:38:49 AM	H2 valve opened
3/23/2010	11:38:49 AM	Helium MFC set to  0.000000
3/23/2010	11:38:49 AM	H2 MFC set to  500.000000
3/23/2010	11:38:49 AM	BCl3 MFC set to  0.000000
3/23/2010	11:38:49 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:38:49 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:38:49 AM	Tube furnace set to 0
3/23/2010	11:40:10 AM	Helium valve closed
3/23/2010	11:40:10 AM	BCl3 valve closed
3/23/2010	11:40:10 AM	PH3 valve closed
3/23/2010	11:40:10 AM	SiCl4 pre valve closed
3/23/2010	11:40:10 AM	SiCl4 post valve closed
3/23/2010	11:40:10 AM	Main Vac valve closed
3/23/2010	11:40:10 AM	Bypass valve closed
3/23/2010	11:40:10 AM	H2 valve opened
3/23/2010	11:40:10 AM	Bubbler valve opened
3/23/2010	11:40:10 AM	Helium MFC set to  0.000000
3/23/2010	11:40:10 AM	H2 MFC set to  500.000000
3/23/2010	11:40:10 AM	BCl3 MFC set to  0.000000
3/23/2010	11:40:10 AM	SiCl4 MFC set to  0.000000
3/23/2010	11:40:10 AM	Bypass solenoid MFC set to  0.000000
3/23/2010	11:40:10 AM	Tube furnace set to 0
3/23/2010	12:00:10 PM	Helium valve closed
3/23/2010	12:00:10 PM	BCl3 valve closed
3/23/2010	12:00:10 PM	PH3 valve closed
3/23/2010	12:00:10 PM	Main Vac valve closed
3/23/2010	12:00:10 PM	Bypass valve closed
3/23/2010	12:00:10 PM	H2 valve opened
3/23/2010	12:00:10 PM	SiCl4 pre valve opened
3/23/2010	12:00:10 PM	SiCl4 post valve opened
3/23/2010	12:00:10 PM	Bubbler valve opened
3/23/2010	12:00:10 PM	Helium MFC set to  0.000000
3/23/2010	12:00:10 PM	H2 MFC set to  500.000000
3/23/2010	12:00:10 PM	BCl3 MFC set to  0.000000
3/23/2010	12:00:10 PM	SiCl4 MFC set to  325.000000
3/23/2010	12:00:10 PM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:00:10 PM	Tube furnace set to 0
3/23/2010	12:20:11 PM	Helium valve closed
3/23/2010	12:20:11 PM	BCl3 valve closed
3/23/2010	12:20:11 PM	PH3 valve closed
3/23/2010	12:20:11 PM	SiCl4 pre valve closed
3/23/2010	12:20:11 PM	SiCl4 post valve closed
3/23/2010	12:20:11 PM	Main Vac valve closed
3/23/2010	12:20:11 PM	Bypass valve closed
3/23/2010	12:20:11 PM	H2 valve opened
3/23/2010	12:20:11 PM	Bubbler valve opened
3/23/2010	12:20:11 PM	Helium MFC set to  0.000000
3/23/2010	12:20:11 PM	H2 MFC set to  500.000000
3/23/2010	12:20:11 PM	BCl3 MFC set to  0.000000
3/23/2010	12:20:11 PM	SiCl4 MFC set to  0.000000
3/23/2010	12:20:11 PM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:20:11 PM	Tube furnace set to 0
3/23/2010	12:40:11 PM	H2 valve closed
3/23/2010	12:40:11 PM	BCl3 valve closed
3/23/2010	12:40:11 PM	PH3 valve closed
3/23/2010	12:40:11 PM	SiCl4 pre valve closed
3/23/2010	12:40:11 PM	SiCl4 post valve closed
3/23/2010	12:40:11 PM	Main Vac valve closed
3/23/2010	12:40:11 PM	Bypass valve closed
3/23/2010	12:40:11 PM	Helium valve opened
3/23/2010	12:40:11 PM	Bubbler valve opened
3/23/2010	12:40:11 PM	Helium MFC set to  500.000000
3/23/2010	12:40:11 PM	H2 MFC set to  0.000000
3/23/2010	12:40:11 PM	BCl3 MFC set to  0.000000
3/23/2010	12:40:11 PM	SiCl4 MFC set to  0.000000
3/23/2010	12:40:11 PM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:40:11 PM	Tube furnace set to 0
3/23/2010	12:45:41 PM	Run aborted at 12:45 PM
3/23/2010	12:45:41 PM	Helium valve closed
3/23/2010	12:45:41 PM	H2 valve closed
3/23/2010	12:45:41 PM	BCl3 valve closed
3/23/2010	12:45:41 PM	PH3 valve closed
3/23/2010	12:45:41 PM	SiCl4 pre valve closed
3/23/2010	12:45:41 PM	SiCl4 post valve closed
3/23/2010	12:45:41 PM	Bypass valve closed
3/23/2010	12:45:41 PM	Main Vac valve closed
3/23/2010	12:45:41 PM	Bubbler valve closed
3/23/2010	12:45:41 PM	Helium MFC set to  0.000000
3/23/2010	12:45:41 PM	H2 MFC set to  0.000000
3/23/2010	12:45:41 PM	BCl3 MFC set to  0.000000
3/23/2010	12:45:41 PM	SiCl4 MFC set to  0.000000
3/23/2010	12:45:41 PM	Tube furnace set to 0
3/23/2010	12:54:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	12:54:57 PM	Recipe started at 12:54 PM
3/23/2010	12:54:57 PM	Helium valve closed
3/23/2010	12:54:57 PM	H2 valve closed
3/23/2010	12:54:57 PM	BCl3 valve closed
3/23/2010	12:54:57 PM	PH3 valve closed
3/23/2010	12:54:57 PM	SiCl4 pre valve closed
3/23/2010	12:54:57 PM	SiCl4 post valve closed
3/23/2010	12:54:57 PM	Main Vac valve closed
3/23/2010	12:54:57 PM	Bubbler valve closed
3/23/2010	12:54:57 PM	Bypass valve opened
3/23/2010	12:54:57 PM	Helium MFC set to  0.000000
3/23/2010	12:54:57 PM	H2 MFC set to  0.000000
3/23/2010	12:54:57 PM	BCl3 MFC set to  0.000000
3/23/2010	12:54:57 PM	SiCl4 MFC set to  0.000000
3/23/2010	12:54:57 PM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:54:57 PM	Tube furnace set to 0
3/23/2010	12:55:31 PM	Helium valve closed
3/23/2010	12:55:31 PM	H2 valve closed
3/23/2010	12:55:31 PM	BCl3 valve closed
3/23/2010	12:55:31 PM	PH3 valve closed
3/23/2010	12:55:31 PM	SiCl4 pre valve closed
3/23/2010	12:55:31 PM	SiCl4 post valve closed
3/23/2010	12:55:31 PM	Bubbler valve closed
3/23/2010	12:55:31 PM	Main Vac valve opened
3/23/2010	12:55:31 PM	Bypass valve opened
3/23/2010	12:55:31 PM	Helium MFC set to  0.000000
3/23/2010	12:55:31 PM	H2 MFC set to  0.000000
3/23/2010	12:55:31 PM	BCl3 MFC set to  0.000000
3/23/2010	12:55:31 PM	SiCl4 MFC set to  0.000000
3/23/2010	12:55:31 PM	Bypass solenoid MFC set to  0.000000
3/23/2010	12:55:31 PM	Tube furnace set to 0
3/23/2010	12:55:31 PM	Run finished at 12:55 PM
3/23/2010	12:55:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/23/2010	2:10:00 PM	Main Vac valve closed
3/23/2010	2:10:04 PM	Main Vac valve opened
3/23/2010	2:10:07 PM	Bypass valve closed
3/23/2010	2:10:07 PM	Main Vac valve closed
3/23/2010	2:10:12 PM	Helium MFC set to  100.000000
3/23/2010	2:10:13 PM	Helium valve opened
3/23/2010	2:10:56 PM	Helium MFC set to  500.000000
3/23/2010	2:11:00 PM	Helium valve closed
3/23/2010	2:11:00 PM	Helium valve opened
3/23/2010	2:11:05 PM	Helium MFC set to  5.000000
3/23/2010	2:11:15 PM	Helium MFC set to  500.000000
3/23/2010	2:11:21 PM	Helium MFC set to  0.000000
3/23/2010	2:11:23 PM	Helium valve closed
3/23/2010	2:11:24 PM	Bypass valve opened
3/23/2010	2:11:48 PM	Main Vac valve opened
3/23/2010	2:11:51 PM	Main Vac valve closed
3/23/2010	2:11:54 PM	Main Vac valve opened
3/23/2010	8:54:27 PM	Program exited cleanly
3/23/2010	9:15:35 PM	Program started normally
3/23/2010	9:15:35 PM	Helium valve closed
3/23/2010	9:15:35 PM	H2 valve closed
3/23/2010	9:15:35 PM	BCl3 valve closed
3/23/2010	9:15:35 PM	PH3 valve closed
3/23/2010	9:15:35 PM	SiCl4 pre valve closed
3/23/2010	9:15:35 PM	SiCl4 post valve closed
3/23/2010	9:15:35 PM	Main Vac valve closed
3/23/2010	9:15:35 PM	Bypass valve closed
3/23/2010	9:15:35 PM	Bubbler valve closed
3/23/2010	9:15:35 PM	Helium MFC set to  0.000000
3/23/2010	9:15:35 PM	H2 MFC set to  0.000000
3/23/2010	9:15:35 PM	BCl3 MFC set to  0.000000
3/23/2010	9:15:35 PM	SiCl4 MFC set to  0.000000
3/23/2010	9:15:35 PM	Bypass solenoid MFC set to  760.000000
3/23/2010	9:15:35 PM	Tube furnace set to 0
3/23/2010	9:15:37 PM	Bypass valve opened
3/23/2010	9:15:38 PM	Main Vac valve opened
3/23/2010	9:17:46 PM	Program exited cleanly
3/23/2010	9:20:11 PM	Program started normally
3/23/2010	9:20:11 PM	Helium valve closed
3/23/2010	9:20:11 PM	H2 valve closed
3/23/2010	9:20:11 PM	BCl3 valve closed
3/23/2010	9:20:11 PM	PH3 valve closed
3/23/2010	9:20:11 PM	SiCl4 pre valve closed
3/23/2010	9:20:11 PM	SiCl4 post valve closed
3/23/2010	9:20:11 PM	Main Vac valve closed
3/23/2010	9:20:11 PM	Bypass valve closed
3/23/2010	9:20:11 PM	Bubbler valve closed
3/23/2010	9:20:11 PM	Helium MFC set to  0.000000
3/23/2010	9:20:11 PM	H2 MFC set to  0.000000
3/23/2010	9:20:11 PM	BCl3 MFC set to  0.000000
3/23/2010	9:20:11 PM	SiCl4 MFC set to  0.000000
3/23/2010	9:20:11 PM	Bypass solenoid MFC set to  760.000000
3/23/2010	9:20:11 PM	Tube furnace set to 0
3/23/2010	9:20:13 PM	Bypass valve opened
3/23/2010	9:20:21 PM	Program exited cleanly
3/23/2010	10:44:29 PM	Program started normally
3/23/2010	10:44:29 PM	Helium valve closed
3/23/2010	10:44:29 PM	H2 valve closed
3/23/2010	10:44:29 PM	BCl3 valve closed
3/23/2010	10:44:29 PM	PH3 valve closed
3/23/2010	10:44:29 PM	SiCl4 pre valve closed
3/23/2010	10:44:29 PM	SiCl4 post valve closed
3/23/2010	10:44:29 PM	Main Vac valve closed
3/23/2010	10:44:29 PM	Bypass valve closed
3/23/2010	10:44:29 PM	Bubbler valve closed
3/23/2010	10:44:29 PM	Helium MFC set to  0.000000
3/23/2010	10:44:29 PM	H2 MFC set to  0.000000
3/23/2010	10:44:29 PM	BCl3 MFC set to  0.000000
3/23/2010	10:44:29 PM	SiCl4 MFC set to  0.000000
3/23/2010	10:44:29 PM	Bypass solenoid MFC set to  760.000000
3/23/2010	10:44:29 PM	Tube furnace set to 0
3/23/2010	10:44:30 PM	Bypass valve opened
3/23/2010	10:44:31 PM	Main Vac valve opened
